[1] A. Boes, B. Corcoran, L. Chang, J. Bowers, A. Mitchell. Status and potential of lithium niobate on insulator (LNOI) for photonic integrated circuits. Laser Photonics Rev., 12, 1700256(2018).
[2] K. Noguchi. Broadband Optical Modulators: Science, Technology, and Applications(2012).
[3] M. N. Armenise, C. Ciminelli, F. Dell’ Olio, V. M. N. Passaro. Advances in Gyroscope Technologies(2011).
[4] A. V. Turutin, J. V. Vidal, I. V. Kubasov, A. M. Kislyuk, D. A. Kiselev, M. D. Malinkovich, Y. N. Parkhomenko, S. P. Kobeleva, A. L. Kholkin, N. A. Sobolev. Highly sensitive magnetic field sensor based on a metglas/bidomain lithium niobate composite shaped in form of a tuning fork. J. Magn. Magn. Mater., 486, 165209(2019).
[5] P. Chaudhary, H. Lu, A. Lipatov, Z. Ahmadi, J. P. V. McConville, A. Sokolov, J. E. Shield, A. Sinitskii, J. M. Gregg, A. Gruverman. Low-voltage domain-wall LiNbO3 memristors. Nano Lett., 20, 5873(2020).
[6] D. Sun, Y. Zhang, D. Wang, W. Song, X. Liu, J. Pang, D. Geng, Y. Sang, H. Liu. Microstructure and domain engineering of lithium niobate crystal films for integrated photonic applications. Light Sci. Appl., 9, 197(2020).
[7] B. Zhang, L. Wang, F. Chen. Recent advances in femtosecond laser processing of LiNbO3 crystals for photonic applications. Laser Photonic Rev., 14, 1900407(2020).
[8] L. Carletti, A. Zilli, F. Moia, A. Toma, M. Finazzi, C. Angelis, D. N. Neshev, M. Celebrano. Steering and encoding the polarization of the second harmonic in the visible with a monolithic LiNbO3 metasurface. ACS Photonics, 8, 731(2021).
[9] W. Lu, Z. Gao, X. Liu, X. Tian, Q. Wu, C. Li, Y. Sun, Y. Liu, X. Tao. Rational design of a LiNbO3-like nonlinear optical crystal, Li2ZrTeO6, with high laser-damage threshold and wide mid-IR transparency window. J. Am. Chem. Soc., 140, 13089(2018).
[10] S. Sanna, G. Schmidt. LiNbO3 surfaces from a microscopic perspective. J. Phys. Condens. Matter., 29, 413001(2017).
[11] R. Bhatt, I. Bhaumik, S. Ganesamoorthy, R. Bright, M. Soharab, A. K. Karnal, P. K. Gupta. Control of intrinsic defects in lithium niobate single crystal for optoelectronic applications. Crystals, 7, 23(2017).
[12] P. Galinetto, M. Marinone, D. Grando, G. Samoggia, F. Caccavale, A. Morbiato, M. Musolino. Micro-Raman analysis on LiNbO3 substrates and surfaces: compositional homogeneity and effects of etching and polishing processes on structural properties. Opt. Lasers Eng., 45, 380(2007).
[13] M. Gruber, A. Leitner, D. Kiener, P. Supancic, R. Bermejo. Incipient plasticity and surface damage in LiTaO3 and LiNbO3 single crystals. Mater. Des., 153, 221(2018).
[14] A. V. Sosunov, A. B. Volyntsev, K. B. Tsiberkin, V. A. Yuriev, R. S. Ponomarev. Features of structure and mechanical properties LiNbO3. Ferroelectrics, 506, 24(2017).
[15] J. Piecha, A. Molak, U. Breuer, M. Balski, K. Szot. Features of surface layer of LiNbO3 as-received single crystals: studied in situ on treatment samples modified by elevated temperature. Solid State Ion., 290, 31(2016).
[16] A. A. Anikiev, N. V. Sidorov, M. N. Palatnikov, M. F. Umarov, E. N. Anikieva. Parametrization of nonstoichiometric lithium niobate crystals with different states of defectivity. Opt. Mater., 111, 110729(2021).
[17] A. Sosunov, R. Ponomarev, O. Semenova, I. Petukhov, A. Volyntsev. Effect of pre-annealing of lithium niobate on the structure and optical characteristics of proton-exchanged waveguides. Opt. Mater., 88, 176(2019).
[18] Ya. A. Kosenok, V. E. Gaishun, O. I. Tyulenkova, V. G. Denisman. Aqueous compositions based on nanosized silica particles for chemical-mechanical polishing of silicon wafers. PFMT, 3, 26(2014).
[19] Y. Li, J. Lu, X. Xu. Phase transformation of monocrystalline silicon induced by polishing with diamond abrasives. IEEE Trans. Semicon. Manuf., 28, 153(2015).
[20] Ya. A. Kosenok, V. E. Gaishun, O. I. Tyulenkova. Investigation of the near-surface damaged layer in monocrystalline silicon wafers after chemical-mechanical polishing. PFMT, 4, 25(2018).
[21] Y. Li, T. Lan, D. Yang, M. Xiang, J. Dai, Z. Wang, C. Li. Research of selective etching in LiNbO3 using proton-exchanged wet etching technique. Mater. Res. Express, 7, 056202(2020).
[22] M. Leidinger, K. Buse, I. Breunig. Influence of dry-oxygen-annealing on the residual absorption of lithium niobate crystals in the spectral range from 500 to 2900 nanometers. Opt. Mater. Express, 6, 264(2016).
[23] T. Volk, M. Wohlecke. Lithium Niobate: Defects, Photorefraction and Ferroelectric Switching(2008).
[24] Z. W. Zhong. Recent advances in polishing of advanced materials. Mater. Manuf. Process., 23, 449(2008).
[25] K. Nassau, H. J. Levinstein, G. M. Loiacono. Ferroelectric lithium niobate. 1. Growth, domain structure, dislocations and etching. J. Phys. Chem. Solids, 27, 983(1966).
[26] Z. G. Pinsker. Dynamical Scattering of X-Rays in Crystals(1978).
[27] A. N. Ivanov, P. Klimanek, A. M. Polyakov. Extinction study of dislocations (Bragg diffraction). Mater. Sci. Forum, 321–324, 87(2000).
[28] A. Nakamura, J. Nakamura, I. Kishida, Y. Yokogawa. Dislocation structure at a {1¯21¯0}/〈101¯0〉 low-angle tilt grain boundary in LiNbO3. J. Mater Sci., 47, 5086(2012).
[29] K. Sangval. Etching of Crystals: Theory, Experiment, and Application(1987).
[30] J. Zhao, X. Jiao, Y. Ren, J. Gu, S. Wang, M. Bu, L. Wang. Lithium niobate planar and ridge waveguides fabricated by 3 MeV oxygen ion implantation and precise diamond dicing. Chin. Opt. Lett., 19, 060009(2021).
