Author Affiliations
1 Shanghai Spaceflight Precision Machinery Institute, Shanghai 201600, China1 Wuhan National Laboratory for Optoelectronics, Huazhong University of Science and Technology, Wuhan, Hubei 430074, Chinashow less
Fig. 1. Optical system diagram for laser processing
Fig. 2. Beam expanders commonly used in laser processing. (a) Kepler system; (b) Galileo system
Fig. 3. Schematic of optical system with sequence mode
Fig. 4. Diagram of optical system with non-sequence mode
Fig. 5. Relationship between defocusing amount and distance between beam expanders
Fig. 6. Schematic of tilt angle of beam expander
Fig. 7. Relationship among focal length, defocusing amount and tilt angle of beam expander
Fig. 8. Relationship among peak power, spot diameter and distance between beam expanders
Fig. 9. Relationship among peak power, spot diameter and tilt angle of beam expander
Fig. 10. (a) Distribution of spot energy at different lens distances; (b) distribution of spot energy at different tilt angles; (c) relationship between spot center position and tilt angle of beam expander
Fig. 11. (a) Schematic of experimental setup for measuring focus position; (b) schematic of measuring method; (c) relationship between defocusing amount and lens distance measured in experiment
Fig. 12. Schematic of experimental setup for measuring spot energy distribution
Fig. 13. Distributions of spot energy under different lens distances. (a) Δd=1.0 mm; (b) Δd=0.2 mm; (c) Δd=-0.2 mm; (d) Δd=-1.0 mm
Surface | Radius /mm | Thickness /mm | Glass | Semi-diameter /mm |
---|
OBJ | Infinity | Infinity | - | 0.000 | STO | Infinity | 5.000 | - | 2.500 | 2 | -3.800 | 5.200 | N-BK7 | 3.500 | 3 | -10.450 | 26.100 | - | 5.000 | 4 | 50.600 | 5.100 | N-BK7 | 12.500 | 5 | -50.600 | 50.000 | - | 12.500 | 6 | Infinity | 50.000 | - | 10.868 | 7 | 61.026 | 7.500 | BK7 | 15.000 | 8 | -44.842 | 2.500 | SF5 | 15.000 | 9 | -131.726 | 95.726 | - | 15.000 | Image | Infinity | - | - | 9.826 |
|
Table 1. Parameters of optical system with sequence mode
Item | Object type | Reference object | zposition | Material |
---|
1 | Source Gaussian | 0 | 0 | - | 2 | Detector rect | 0 | 5.000 | - | 3 | Standard lens | 2 | 10.000 | N-BK7 | 4 | Standard lens | 3 | 31.300 | N-BK7 | 5 | Detector rect | 4 | 55.100 | - | 6 | Standard lens | 5 | 50.000 | BK7 | 7 | Standard lens | 6 | 7.500 | SF5 | 8 | Detector rect | 7 | 98.226 | - |
|
Table 2. Parameters of optical system with non-sequential mode
Item | Object type | Reference object | zposition | Tilt angle /(°) |
---|
1 | Source Gaussian | 0 | 0 | 0 | 2 | Detector rect | 0 | 5.000 | 0 | 3 | Standard lens | 0 | 15.000 | 5 | 4 | Standard lens | 0 | 46.300 | 0 | 5 | Detector rect | 0 | 101.400 | 0 | 6 | Standard lens | 0 | 151.400 | 0 | 7 | Standard lens | 0 | 158.900 | 0 | 8 | Detector rect | 0 | 257.126 | 0 |
|
Table 3. Parameters of optical system with non-sequential mode when lens tilt angle is changed
Detector | Spot distribution on xy plane | Spot distribution onx-axis (or y-axis) | Stereogram of distributionof spot irradiance |
---|
2(10 mm×10 mm) | | 5(30 mm×30 mm) | | 8(4 mm×4 mm) | |
|
Table 4. Spot energy distributions in initial position (after filtering)