• Opto-Electronic Engineering
  • Vol. 38, Issue 1, 60 (2011)
YUAN Wen-quan*, GONG Yan, ZHANG Wei, WANG Xue-liang, ZHAO Lei, and NI Ming-yang
Author Affiliations
  • [in Chinese]
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    DOI: Cite this Article
    YUAN Wen-quan, GONG Yan, ZHANG Wei, WANG Xue-liang, ZHAO Lei, NI Ming-yang. Downscaling Model Test Design for Constant-temperature Water Jacket of Lithography Lens[J]. Opto-Electronic Engineering, 2011, 38(1): 60 Copy Citation Text show less
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    CLP Journals

    [1] Peng Haifeng, Yu Xinfeng, Qin Shuo. Design and Performance Testing of Constant-Temperature Water Jacket Small-Scale Model of Lithographic Projection Lens[J]. Laser & Optoelectronics Progress, 2016, 53(8): 81201

    YUAN Wen-quan, GONG Yan, ZHANG Wei, WANG Xue-liang, ZHAO Lei, NI Ming-yang. Downscaling Model Test Design for Constant-temperature Water Jacket of Lithography Lens[J]. Opto-Electronic Engineering, 2011, 38(1): 60
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