Di Zhou, Shilei Jiang, Guobin Sun, Le Kang, Weiguo Liu. Study on Continuation Correction of Ion Beam Polishing to Remove Border Effect[J]. Laser & Optoelectronics Progress, 2022, 59(13): 1322004
- Laser & Optoelectronics Progress
- Vol. 59, Issue 13, 1322004 (2022)
Fig. 1. Extension area
Fig. 2. Simulation removal diagrams of different continuation methods. (a) Initial surface shape; (b) surface shape after polynomial continuation; (c) surface shape after slope continuation; (d) surface shape after plane continuation
Fig. 3. Surface shapes after simulation removal. (a) Surface shape after polynomial continuation simulation; (b) surface shape after slope continuation simulation; (c) surface shape after plane continuation simulation
Fig. 4. Initial surface shape. (a) Surface shape of lens A; (b) surface shape of lens B; (c) surface shape of lens C
Fig. 5. Surface shape after processing. (a) Polynomial continuation ; (b) slope continuation ; (c) plane continuation
Fig. 6. Boundary surfaces after processing. (a) Polynomial continuation; (b) slope continuation; (c) plane continuation
|
Table 1. Simulation results of different continuation methods
|
Table 2. RMS values of surface shape before and after processing by different continuation methods
|
Table 3. Boundary RMS values of surface shape before and after processing by different continuation methods
Set citation alerts for the article
Please enter your email address
© Copyright 2018-2021 | Chinese Laser Press. All Rights Reserved 沪ICP备15018463号-20