Measurement of in-plane deformations of microsystems by digital holography and speckle interferometry

Invited Paper

doi:10.3788/COL20090712.1109

Journals >Chinese Optics Letters >Volume 7 >Issue 12 >Page 1109 > Article

Chinese Optics Letters
Vol. 7, Issue 12, 1109 (2009)

Measurement of in-plane deformations of microsystems by digital holography and speckle interferometry

Invited Paper

Author Affiliations

G. Pedrini1*, J. Gaspar2, O. Paul2, and W. Osten1

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DOI: 10.3788/COL20090712.1109 Cite this Article Set citation alerts

Invited Paper. Measurement of in-plane deformations of microsystems by digital holography and speckle interferometry[J]. Chinese Optics Letters, 2009, 7(12): 1109 Copy Citation Text

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Invited Paper. Measurement of in-plane deformations of microsystems by digital holography and speckle interferometry[J]. Chinese Optics Letters, 2009, 7(12): 1109

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