The improvement of TFT lithography plane compensation

Zhang Yuhu; Xu Haitao; Li Yawen; Luo Chuanwen; Cao Shaobo; Li Li

doi:10.12086/oee.2019.180444

[1] Wang X J. Liquid Crystal Optics & Liquid Cristal Display[M]. Beijing: Science Press, 2006: 230–251.

[2] Shao X B. Recent progress of liquid crystal display technolo-gy[J]. Chinese Journal of Liquid Crystals and Displays, 2000, 15(3): 163–170.

[3] Che C C. CELL research and design of FFS wide viewing angle technology[D]. Chengdu: University of Electronic Science and Technology of China, 2007: 1–6.

[4] Tong L S. Flat panel displays after 2012[J]. Advanced Display, 2007(7): 6–16.

[5] LiWS, Hui G B, Cui C Z, et al. Preliminary study on improving resolution on mirror projection mask aligner with phase shift mask[J]. Chinese Journal of Liquid Crystals and Displays, 2014, 29(4): 544–547.

[6] Xiao W J. A Research on crosstalk in TFT-LCDs[D]. Beijing: Beijing Jiaotong University, 2014: 1–4.

[7] Chun J Y, KangC H, Ahn S J, et al. A-Si TFT-LCD mobile display with high pixel density using PenTile RGB WTM algo-rithm[J]. Chinese Journal of Liquid Crystals and Displays, 2006, 21(5): 474–477.

[8] Feng B R, Zhang J, Hou D S, et al. Optical microlithography with phase-shifting mask and optical proximity effect correc-tion[J]. Opto-Electronic Engineering, 2001, 28(1): 1–5.

[9] Miu X Y. Focal Plane Measure and Control Study[D]. Shanghai: Fudan University, 2006: 5–9.

[10] LiWS, Hui G B, Cui C Z, et al. Preliminary study on improving photolithographic resolution of display technology with phase shift mask[J]. Optoelectronic Technology, 2014, 34(4): 234–237.