• Chinese Physics B
  • Vol. 29, Issue 10, (2020)
Tao-Tao Que1, Ya-Wen Zhao1, Qiu-Ling Qiu1, Liu-An Li1, Liang He2, Jin-Wei Zhang1, Chen-Liang Feng1, Zhen-Xing Liu1, Qian-Shu Wu1, Jia Chen1, Cheng-Lang Li1, Qi Zhang1, Yun-Liang Rao1, Zhi-Yuan He3, and Yang Liu1、†
Author Affiliations
  • 1School of Electronics and Information Technology, Sun Yat-Sen University, Guangzhou 50275, China
  • 2School of Materials Science and Engineering, Sun Yat-Sen University, Guangzhou 51075, China
  • 3Science and Technology on Reliability Physics and Application of Electronic Component Laboratory, No. 5 Electronics Research Institute of the Ministry of Industry and Information Technology, Guangzhou 510610, China
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    DOI: 10.1088/1674-1056/abaed8 Cite this Article
    Tao-Tao Que, Ya-Wen Zhao, Qiu-Ling Qiu, Liu-An Li, Liang He, Jin-Wei Zhang, Chen-Liang Feng, Zhen-Xing Liu, Qian-Shu Wu, Jia Chen, Cheng-Lang Li, Qi Zhang, Yun-Liang Rao, Zhi-Yuan He, Yang Liu. Evaluation of stress voltage on off-state time-dependent breakdown for GaN MIS-HEMT with SiNx gate dielectric[J]. Chinese Physics B, 2020, 29(10): Copy Citation Text show less

    Abstract

    Stress voltages on time-dependent breakdown characteristics of GaN MIS-HEMTs during negative gate bias stress (with VGS < 0, VD = VS = 0) and off-state stress (VG < VTh, VDS > 0, VS = 0) are investigated. For negative bias stress, the breakdown time distribution (β) decreases with the increasing negative gate voltage, while β is larger for higher drain voltage at off-state stress. Two humps in the time-dependent gate leakage occurred under both breakdown conditions, which can be ascribed to the dielectric breakdown triggered earlier and followed by the GaN layer breakdown. Combining the electric distribution from simulation and long-term monitoring of electric parameter, the peak electric fields under the gate edges at source and drain sides are confirmed as the main formation locations for per-location paths during negative gate voltage stress and off-state stress, respectively.
    Tao-Tao Que, Ya-Wen Zhao, Qiu-Ling Qiu, Liu-An Li, Liang He, Jin-Wei Zhang, Chen-Liang Feng, Zhen-Xing Liu, Qian-Shu Wu, Jia Chen, Cheng-Lang Li, Qi Zhang, Yun-Liang Rao, Zhi-Yuan He, Yang Liu. Evaluation of stress voltage on off-state time-dependent breakdown for GaN MIS-HEMT with SiNx gate dielectric[J]. Chinese Physics B, 2020, 29(10):
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