[1] Sturz R A. Advances in low-light-level video imaging. Proc. SPIE, 1995, 2555:196~206
[2] Thompson R J. New developments in night-vision equipment and techniques. IEEE Annual International Carnahan Conference on Security Technology, Proc. 1995, Piscataway, NJ, USA, 95CH3578-8:144~146
[3] Estrera J P, Sinor T W, Passmore K T et al.. Development of extended red (1.0~1.3 micron) image intensifiers. Proc. SPIE, 1995, 2551:135~144
[4] Scribner D A, Kruer M R, Killiany J M. Infrared focal plane array technology. Proc. IEEE, 1991, 79(1):66~85
[5] Bruce C F, Jr.. Some recent advances and applications of infrared detector technology at the jet propulsion laboratory. Proc. IEEE Aerospace Applications Conference, 1995, 2:93~103
[6] Lerner E J. Infrared array detectors create thermal images. Laser Focus World, 1996, 32:105~110
[7] Cole B E, Higashi R E, Wood R A. Monolithic two-dimensional arrays of micromachined microstructures for infrared applications. Proc. IEEE, 1998, 86(8):1679~1686
[8] Lai J, Perazzo T, Shi S et al.. Optimization and performance of high-resolution micro-optomechanical thermal sensors. Sensors and Actuators (A), 1997, 58:113~119
[9] Baltes H, Paul O, Brand O. Micromachined thermally based CMOS microsensors. Proc. IEEE, 1998, 86(8):1660~1678
[10] Feather G A, Monk D W. The digital micromirror device for projection display. Proc. of Seventh Annual IEEE International Conference on Wafer Scale Integration, 1995. 43~51
[11] Vdovin G, Sarro P M. Flexible mirror micromachined in silicon. Appl. Opt., 1995, 34(16):2968~2972
[12] Bustillo J M, Howe R T, Muller R S. Surface micromachining for microelectromechanical systems. Proc. IEEE, 1998, 86(8):1552~1574
[13] Born M, Wolf E. Principle of Optics. New York: Pergamon Press, 1964.
[14] Roark R J, Young W C. Formulas for Stress and Strain. 5th ed., New York: McGrawHill, 1972.
[15] Sarid D. Scanning Force Microscopy with Applicatin to Electric, Magnetic, and Atomic Forces. New York: Oxford University Press, 1991.
[16] Funk J M, Korvink J G, Bühler J et al.. SOLIDIS: A tool for microactuator simulation in 3-D. J. Microelectromech. Syst., 1997, 6(1):70~82