• Laser & Optoelectronics Progress
  • Vol. 52, Issue 11, 111202 (2015)
[in Chinese]1、2、3、*, [in Chinese]1, [in Chinese], [in Chinese]1、2、3, and [in Chinese]
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  • 1[in Chinese]
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    DOI: 10.3788/lop52.111202 Cite this Article Set citation alerts
    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Analysis of Modulation Function in the One-Dimensional Phase Shifting Lateral Shearing Interferometry[J]. Laser & Optoelectronics Progress, 2015, 52(11): 111202 Copy Citation Text show less
    References

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    [3] Y Ohsaki, T Mori, Y Koga, et al.. A new on-machine measurement system to measure wavefront aberrations of projection optics with hyper-NA[C]. SPIE, 2006, 6154: 615424.

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    [6] A A MacDowell, O R Wood, J E Bjorkholm. Interferometric testing of EUV lithography cameras[C]. SPIE, 1997, 3152: 202-210.

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    [8] K Sugisaki, M Okada, Z Yucong, et al.. Comparisons between EUV at- wavelength metrological methods[C]. SPIE, 2005, 5921: 59210D.

    [9] P P Naulleaua, K A Goldberg, J Bokor. Extreme ultraviolet carrier-frequency shearing interferometry of a lithographic four-mirror optical system[J]. J Vac Sci Technol B, 2000, 18(6): 2939-2943.

    [10] M Hasegawa, C Ouchi, T Haseqawa, et al.. Recent progress of EUV wavefront metrology in EUVA[C]. SPIE, 2004, 5533: 27-36.

    [11] Zhixiang Liu, Tingwen Xing, Yadong Jiang, et al.. Two- dimension lateral shearing interferometry for microscope objective wavefront metrology[C]. SPIE, 2014, 9272: 92721B.

    [12] Hai Wang, Yanqiu Li, Ke Liu. Approach to characterize manufacture tolerances of two-dimensional cross-phase grating [J]. Opt Eng, 2013, 52(10): 104101.

    [13] He Xu, Xiang Yang. Phase-shifting technology of digital lateral shearing interferometer[J]. Optics and Precision Engineering, 2013, 21(9): 2245-2251.

    [14] Fang Chao, Xiang Yang. A thirteen- step phase restoration algorithm in lateral shearing interferometry[J]. Chinese J Lasers, 2014, 41(5): 0508003.

    [15] Li Jie, Tang Feng, Wang Xiangzhao, et al.. System errors analysis of grating lateral shearing interferometer[J]. Chinese J Lasers, 2014, 41(5): 0508006.

    [16] D Malacara. Optical Shop Testing[M]. 3rd ed. New York: John Wiley and Sons Press, 2007: 122-126.

    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Analysis of Modulation Function in the One-Dimensional Phase Shifting Lateral Shearing Interferometry[J]. Laser & Optoelectronics Progress, 2015, 52(11): 111202
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