• Laser & Optoelectronics Progress
  • Vol. 53, Issue 10, 103101 (2016)
Sun Yao1、2、3、* and Wang Hong1、2、3
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
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    DOI: 10.3788/lop53.103101 Cite this Article Set citation alerts
    Sun Yao, Wang Hong. Spectral Ellipsometry of Dielectric/Metal/Dielectric Transparent Conductive Multi-Layer Films[J]. Laser & Optoelectronics Progress, 2016, 53(10): 103101 Copy Citation Text show less
    References

    [1] Liu Jing, Liu Dan, Gu Zhen′an. Research progress of D/M/D transparent conductive multilayer films[J]. Materials Review, 2005, 8(19): 9-12.

    [2] Sun Yao, Wang Yongbin, Wang Hong. Agglomeration morphology and element segregation of Ag film in low-emissivity stacks[J]. Bulletin of the Chinese Ceramic Society, 2015, 34(s): 96-100.

    [3] Huang Jiamu, Jiang Pan, Dong Siqin. Study on optical property of TiNx/Ag/TiNx multilayer films[J]. Acta Optica Sinica, 2010, 30(6): 1846-1850.

    [4] Sun Y, Wang H. Influence of deposition mode in reactively sputtered ZnO underlayer on thermal stability of thin silver films[J]. Materials Science Forum, 2016, 852: 1018-1024.

    [5] Sun Yao, Wang Hong. Surface modification of glass substrate by linear ion source[J]. Journal of the Chinese Ceramic Society, 2015, 43(11): 1561-1566.

    [6] Danisman K, Danisman S, Savas S, et al. Modelling of the hysteresis effect of target voltage in reactive magnetron sputtering process by using neural networks[J]. Surface and Coatings Technology, 2009, 204(5): 610-614.

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    [8] Herzinger C M, Johs B D. Dielectric function parametric model and method of use: US5796983A[P]. 1998-08-18.

    [9] Synowicki R A. Suppression of backside reflections from transparent substrates[J]. Physica Status Solidi (c), 2008, 5(5): 1085-1088.

    [10] Hong R J, Qi H J, Huang J B, et al. Influence of oxygen partial pressure on the structure and photoluminescence of direct current reactive magnetron sputtering ZnO thin films[J]. Thin Solid Films, 2005, 473(1): 58-62.

    [11] Cho E N, Park S, Yun I. Spectroscopic ellipsometry modeling of ZnO thin films with various O2 partial pressures[J]. Current Applied Physics, 2012, 12(6): 1606-1610.

    [12] Hu Hui, Zhang Liping, Meng Fanying, et al. Application of spectroscopic ellipsometry for the study of electrical and optical properties of indium tin oxide thin films[J]. Acta Optica Sinica, 2014, 34(10): 1031003.

    [13] Tang Jinfa, Gu Peifu, Liu Xu, et al. Modern optical thin film technology[M]. Hangzhou: Zhejiang University Press, 2013: 17.

    [14] Zhu Xiaolong, Xiao Jun, Ma Zi. Wide spectrum optical properties for HFO2 films[J]. Laser & Optoelectronics Progress, 2016, 53(3): 033101.

    [15] Zhao Qingnan, Dong Yuhong, Liu Ying, et al. Surface composition and refractive index of the as-deposited and rapidly annealed silicon nitride thin films[J]. Journal of Wuhan University of Technology, 2010, 32(22): 156-159.

    [16] Tian Shi. Physical properties of materials[M]. Beijing: Beihang University Press, 2001: 58.

    [17] Sun Yao, Wang Hong. Influence of sputter parameters on optical constants of SiNx dielectric film in D/M/D structures[J]. Journal of Aeronautical Materials, 2015, 35(4): 28-33.

    Sun Yao, Wang Hong. Spectral Ellipsometry of Dielectric/Metal/Dielectric Transparent Conductive Multi-Layer Films[J]. Laser & Optoelectronics Progress, 2016, 53(10): 103101
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