• Acta Photonica Sinica
  • Vol. 49, Issue 9, 0931001 (2020)
Feng TIAN, Ran BI, Wen-yuan ZHAO, Feng-bo HAN, Ya-dan LI, Chuan-tao ZHENG, and Yi-ding WANG*
Author Affiliations
  • State Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun 130012, China
  • show less
    DOI: 10.3788/gzxb20204909.0931001 Cite this Article
    Feng TIAN, Ran BI, Wen-yuan ZHAO, Feng-bo HAN, Ya-dan LI, Chuan-tao ZHENG, Yi-ding WANG. Infrared Indium Oxide Hf-doped Transparent Conductive Films[J]. Acta Photonica Sinica, 2020, 49(9): 0931001 Copy Citation Text show less
    References

    [1] Lei ZHANG, Yuan-jun ZHOU, Lu GUO. Correlated metals as transparent conductors. Nature Materials, 15, 204-210(2015).

    [2] S JOSEPH, S BERGER. Infrared transparency and electrical conductivity of non-stoichiometric InxOy films. Materials Science and Engineering B, 172, 213-224(2010).

    [4] M PICCARDO, M TAMAGNONE, B SCHWARZ. Radio frequency transmitter based on a laser frequency comb. Proceedings of the National Academy of Sciences of the United States of America, 116, 9181-9185(2019).

    [5] Ya-hui CHUAI, Hong-zhi SHEN, Ya-dan LI. Epitaxial growth of highly infrared-transparent and conductive CuScO2 thin film by polymer-assisted-deposition method. RSC Advances, 5, 49301-49307(2015).

    [6] Ya-hui CHUAI, Xin WANG, Chuan-tao ZHENG. Highly infrared-transparent and p-type conductive CuSc1-xSnxO2 thin films and a p-CuScO2:Sn/n-ZnO heterojunction fabricated by the polymer-assisted deposition method. RSC Advances, 6, 31726-31731(2016).

    [7] Shuai GUO, Lei YANG, Bing DAI. The research progress about the effect of carrier concentration and mobility on the infrared transparent properties and conductive properties of oxide thin films. Scientia Sinica(Technologica), 48, 583-595(2018).

    [8] Lei YANG, Jia-qi ZHU, Jie BAI. Plasma exposure inducing crystallization of indium oxide film with improved electrical and mechanical properties at room temperature. Journal of Materials Science, 49, 5955-5960(2014).

    [9] Hua-fei DU, Ming-yun LV, Jun-hui MENG. Tri-band transparent conductive coating of indium tin oxide. Applied Optics, 55, D115-D119(2016).

    [11] T A GESSERT, J BURST, X LI. Advantages of transparent conducting oxide thin films with controlled permittivity for thin film photovoltaic solar cells. Thin Solid Films, 519, 7146-7148(2011).

    [12] E KOBAYASHI, Y WATABE, T YAMAMOTO. High-mobility transparent conductive thin films of cerium-doped hydrogenated indium oxide. The Japan Society of Applied Physics, 8, 015505(2015).

    [13] S KALEEMULLA, N M RAO, M JOSHI. Electrical and optical properties of In2O3:Mo thin films prepared at various Mo-doping levels. Journal of Alloys and Compounds, 504, 351-356(2010).

    [14] P KONDAIAH, H SHAIK, G RAO. Studies on RF magnetron sputtered HfO2 thin films for microelectronic applications. Electronic Materials Letters, 11, 592-600(2015).

    [15] C ROBERT. Ionized Impurity Scattering in Degenerate In2O3. Applied. Physics, 2, 247-256(1973).

    [16] A WALSH, D SCANLON. Polymorphism of indium oxide:Materials physics of orthorhombic In2O3. Physical Review B, 88, 1161201(2013).

    [17] E KOBAYASHI, Y WATABE, T YAMAMOTO. High-mobility transparent conductive thin films of cerium-doped hydrogenated indium oxide. Applied Physics Express, 8, 015505-1(2015).

    [18] Y JOHN, W SETO. The electrical properties of polycrystalline silicon films. Journal of Applied Physics, 46, 5247-5254(1975).

    Feng TIAN, Ran BI, Wen-yuan ZHAO, Feng-bo HAN, Ya-dan LI, Chuan-tao ZHENG, Yi-ding WANG. Infrared Indium Oxide Hf-doped Transparent Conductive Films[J]. Acta Photonica Sinica, 2020, 49(9): 0931001
    Download Citation