• Acta Photonica Sinica
  • Vol. 52, Issue 10, 1052420 (2023)
Lei SHANG, Liner ZOU*, Xifei YANG, Le LI, and Yun SHEN
Author Affiliations
  • School of Physics and Materials Science,Nanchang University,Nanchang 330031,China
  • show less
    DOI: 10.3788/gzxb20235210.1052420 Cite this Article
    Lei SHANG, Liner ZOU, Xifei YANG, Le LI, Yun SHEN. Preparation of As2S3 Chalcogenide Ridge Waveguide Based on AZ5214 Photoprotective Layer[J]. Acta Photonica Sinica, 2023, 52(10): 1052420 Copy Citation Text show less
    References

    [1] Qiming LIU, Xiujian ZHAO, Fuxi GAN. Second harmonic generation in the system Ge-As-S and analysis of the poling mechanism. Acta Physica Sinica, 49, 1726-1730(2000).

    [2] B J EGGLETON, B LUTHER DAVIES, K RICHARDSON. Chalcogenide photonics. Nature Photonics, 5, 141-148(2011).

    [3] Fangxing LIAO, Xunsi WANG, Qiuhua NIE et al. Preparation and properties of low-loss core-cladding structure Ge-Te-Se fiber based on the extrusion technology. Acta Photonica Sinica, 44, 1006003(2015).

    [4] C R PETERSEN, M B LOTZ, C MARKOS et al. Thermo-mechanical dynamics of nanoimprinting anti-reflective structures onto small-core mid-IR chalcogenide fibers. Chinese Optics Letters, 9, 030603(2021).

    [5] Bin ZHANG, Zhaohui LI. Sulfur-based integrated photonics. Acta Optica Sinica, 42, 2313001(2022).

    [6] Liner ZOU, Panpan HE, Jiwu FU et al. Fabrication of Bragg gratings in low-loss As2S3 chalcogenide fiber using +1/-1 phase mask and 532 nm laser. Acta Photonica Sinica, 46, 0706001(2017).

    [7] M ALZAID, A QASEM, E R SHAABAN et al. Extraction of thickness, linear and nonlinear optical parameters of Ge20+xSe80-x thin films at normal and slightly inclined light for optoelectronic devices. Optical Materials, 110, 110539(2020).

    [8] Lei PAN, Baoan SONG, Chuanfu XIAO et al. Optical properties and microstructure of two Ge-Sb-Se thin films. Acta Physica Sinica, 69, 114201(2020).

    [9] L E ZOU, P P HE, B X CHEN et al. Nonlinear optical properties of As20S80 system chalcogenide glass using Z-scan and its strip waveguide under bandgap light using the self-phase modulation. AIP Advances, 7, 4976107(2017).

    [10] Q ZHANG, J H ZENG, L ZHU et al. Temperature sensors based on multimode chalcogenide fibre Bragg gratings. Journal of Modern Optics, 65, 1404653(2018).

    [11] W Q GAO, X LI, P WANG et al. Investigation on sensing characteristics of fiber Bragg gratings based on soft glass fibers. Optik-International Journal for Light and Electron Optics, 156, 13-21(2018).

    [12] Qian ZHANG, Peiqing ZHANG, Jianghui ZENG et al. Mid-infrared fiber grating optical switch of Ge20As20Se15Te45 chalcogenide glass. Infrared and Laser Engineering, 46, 0720002(2017).

    [13] E YOUSEFI, M HATAMI. A numerical method for pulse propagation in nonlinear fiber Bragg grating with ternary stability nature. Optical Fiber Technology, 54, 102075(2020).

    [14] L SCHOLTZ, L LADANYI, J MULLEROVA. Numerically analyzed spectral and temporal management of all-optical switching based on chalcogenide bistable fiber Bragg gratings. Optical and Quantum Electronics, 49, 1-14(2017).

    [15] G R ELLIOTT, G S MURUGAN, J S WILKINSON et al. Chalcogenide glass microsphere laser. Optics Express, 18, 26720-26727(2010).

    [16] J F VIENS, C MENEGHINI, A VILLENEUVE et al. Fabrication andcharacterization of integrated optical waveguides in sulfide chalcogenide glasses. Journal of Lightwave Technology, 17, 1184(1999).

    [17] M R KROGSTAD, AHN S , W PARK et al. Optical characterization of chalcogenide Ge-Sb-Se waveguides at telecom wavelengths. IEEE Photonics Technology Letters, 28, 2720-2723(2016).

    [18] H LIN, L LI, Y ZOU et al. Demonstration of high-Q mid-infrared chalcogenide glass-on-silicon resonators. Optics Letters, 38, 1470-1472(2013).

    [19] Y RUAN, W LI, R JARVIS et al. Fabrication and characterization of low loss rid chalcogenide waveguides made by dry etching. Optics Express, 12, 5140-5145(2004).

    [20] S J MADDEN, D Y CHOI, D A BULLA et al. Low loss etched As2S3, chalcogenide waveguidesfor all-optical signal regeneration. Optics Express, 15, 14414-14421(2007).

    [21] W SHEN, P ZENG, Z YANG et al. Chalcogenide glass photonic integration for improved 2 μm optical interconnection. Photonics Research, 8, 1484-1490(2020).

    [22] D Y CHOI, S MADDEN, D A BULLA et al. Submicrometer thick low-loss As2S3 planarwaveguides for nonlinear optical devices. IEEE Photonics Technology Letters, 22, 495-497(2010).

    [23] D Y CHOI, S MADDEN, D BULLA et al. SU-8 protective layer in photo resist patterning on As2S3 film. Physica Status Solidi, 8, 3183-3186(2011).

    [24] T KOHOUTEK, T WAGNER, J ORAVA et al. Amorphous films of Ag-As-S system prepared by spin-coating technique, preparation techniques and films physico-chemical properties. Vacuum, 76, 191-194(2004).

    [25] J MARIA MARGARIT, G VERGARA, V VILLAMAYOR et al. A 2 Kfps sub-µW/pix uncooled-PbSe digital imager with 10 bit DR adjustment and fpn correction for high-speed and low-cost MWIR applications. IEEE Journal Solid-State Circuits, 50, 2394-2405(2015).

    [26] V NAZABAL, A M JURDYC, P NEMEC et al. Amorphous Tm+ doped sulfied thin films fabricated by sputtering. Optical Materials, 33, 220-226(2010).

    [27] D BULLA, R P WANG, A PRASAD et al. On the properties and stability of thermally evaporated Ge-As-Se thin films. Applied Physics A, 96, 615-625(2009).

    [28] D G KIM, S HAN, J HWANG et al. Universal light guiding geometry for on-chip resonators having extremely high Q-factor. Nature Communications, 11, 5933(2020).

    Lei SHANG, Liner ZOU, Xifei YANG, Le LI, Yun SHEN. Preparation of As2S3 Chalcogenide Ridge Waveguide Based on AZ5214 Photoprotective Layer[J]. Acta Photonica Sinica, 2023, 52(10): 1052420
    Download Citation