Lei SHANG, Liner ZOU, Xifei YANG, Le LI, Yun SHEN. Preparation of As2S3 Chalcogenide Ridge Waveguide Based on AZ5214 Photoprotective Layer[J]. Acta Photonica Sinica, 2023, 52(10): 1052420
- Acta Photonica Sinica
- Vol. 52, Issue 10, 1052420 (2023)
Fig. 1. Surface roughness diagram before and after annealing of As2S3 film
Fig. 2. Preparating process of As2S3 ridge waveguide
Fig. 3. Surface of As2S3 film developed with and without bottom film
Fig. 4. Photoprotective layer parameters
Fig. 5. Waveguide profile under different parameters
Fig. 6. As2S3 ridge waveguide topography diagram
Fig. 7. TE mode field distribution under the structural parameters of As2S3 ridge waveguide which was prepared
Fig. 8. Insertion loss of different lengths（at 1 550 nm guide mode）
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Table 1. Dependece of the thickness of bottom film（photoprotective layer）on the exposure dose and development time
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