Hydrogen free Diamond Like Carbon (DLC) films have been deposited by XeCl(308 nm) pulsed laser ablation of graphite targets with a base pressure of only 1×10 -3 Pa. The deposition process is performed with a laser power density of 5×10 8 W/cm 2 at room temperature. Properties of the films and the effects of a variety of process parameters on the film properties have been investigated. The emission spectra of laser induced plasma and the key factors in the process of DLC film deposition are discussed.