• Microelectronics
  • Vol. 53, Issue 2, 326 (2023)
CHEN Yu1、2、3, WU Qiannan1、2、3, ZHAN Yongxin1、2、3, LI Xiaoqi1、2、3, GUO Honglei1、2、3, and LI Mengwei1、2、3
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
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    DOI: 10.13911/j.cnki.1004-3365.220136 Cite this Article
    CHEN Yu, WU Qiannan, ZHAN Yongxin, LI Xiaoqi, GUO Honglei, LI Mengwei. Design of an L to Ka-Band Double-Sided Multi-Contact RF MEMS Single Pole Six Throw Switch[J]. Microelectronics, 2023, 53(2): 326 Copy Citation Text show less
    References

    [1] ANUROOP, BANSAL D, KHUSHBU, et al. Contact area design of ohmic RF MEMS switch for enhanced power handling [C] // Twelfth Int Conf Sensing Technol (ICST). Limerick, Ireland. 2018: 91-95.

    [2] RAO K S, THALLURI L N, GUHA K, et al. Fabrication and characterization of capacitive RF MEMS perforated switch [J]. IEEE Access, 2018, 6: 77519-77528.

    [3] ROY S C, RANGRA K J. Design optimization of RF MEMS SP4T and SP6T switch [C] // Int Semicond Conf. Sinaia, Romania. 2009: 443-446.

    [6] YANG H H, YAHIAOUI A, ZAREIE H, et al. Symmetric and compact single-pole multiple-throw (SP7T, SP11T) RF MEMS switches [J]. J Microelectromech Syst, 2015, 24(3): 685-695.

    [11] ZHANG Y L, GONG Z H, LIU H L, et al. Power handling capability enhanced RF MEMS switch using modified-width cantilevers structure [C] // IEEE 16th Int Conf Nano/ Micro Engineered and Molecular Syst (NEMS) . Xiamen, China. 2021: 695-698.

    [12] DEY S, KOUL S, PODDAR A, et al. Ku to V-band 4-bit MEMS phase shifter bank using high isolation SP4T switches and DMTL structures [J]. J Micromechanics Microengineering, 2018, 28(2): 1-10.

    [14] MIRZAJANI H, ILKHECHI A K, ZOLFAGHARI P, et al. Power effcient, low loss and ultra-high isolation RF MEMS switch dedicated for antenna switch applications [J]. Microelec J, 2017, 69: 64-72.

    [16] DEY S, KOUL S, PODDAR A, et al. Reliable and compact 3- and 4-bit phase shifters using MEMS SP4T and SP8T switches[J]. J Microelectromech Syst, 2018, 27(1): 113-124.

    CHEN Yu, WU Qiannan, ZHAN Yongxin, LI Xiaoqi, GUO Honglei, LI Mengwei. Design of an L to Ka-Band Double-Sided Multi-Contact RF MEMS Single Pole Six Throw Switch[J]. Microelectronics, 2023, 53(2): 326
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