[1] J. W. Goodman, F. I. Leonberger, S. Y. Kung et al.. Optical interconnections for VLSI systems. Proc. IEEE, 1984, 72(7): 850~866
[2] R. A. Soref, J. P. Brenzo. All silicon active and passive gided-wave components for λ=1.3 μm and 1.6 μm. IEEE J. Quant. Electron., 1986, QE-22(6): 873~879
[3] B. L. Weiss, G. T. Reed, S. K. Ioh et al.. Optical waveguides in SIMOX structures. Photon. Technolo. Lett., 1991, 3(1): 19~21
[4] R. A. Soref, F. Namavor, J. P. Lorenzo. Optical waveguiding in a single-crystal layer of germanium silicon grown on silicon. Opt. Lett., 1990, 15(5): 270~272
[5] H. Bezzaoui, E. Voges, Integrated optical combined with micromechamics on silicon. Sensors and Actuators (A), 1991, 29(3): 219~223
[6] N. Takato, J. Kaname, Y. Mitsuho et al.. Silica based single-mode waveguides on silicon and their application to guided-wave optics interferometers. J. Lightwave Technol., 1988, 6(6): 1003~1010
[7] D. E. Zelmon, J. T. Soyd, H. Jackon et al.. Low loss optical waveguides fabricated by thermal nitridation of oxidized silicon. Appl. Phys. Lett., 1985, 47(4): 353~355
[8] M. D. Gindice, F. Bruno, T. Cicinelli et al.. Structural and optical properties of silicon oxynitride on silicon planar waveguides. Appl. Opt., 1990, 29(24): 3489~3496
[9] K. Kapser, C. Wagner, P. Deimel et al.. Rapid deposition of high-quality silicon-oxynitride waveguides. IEEE Photon. Techno. Lett., 1991, 3(12): 1096~1098
[10] F. Brono, M. D. Guidico, R. Recca et al.. Plasma-enhanced chemical vapor deposition of low-loss SiON optical waveguides at 1.5 μm wavelength. Appl. Opt., 1991, 30(31): 4560~4564
[11] W. Gleine, J. Muller. Laser triming of SiON components for integrated optics. J. Lightwave Technol., 1991, 9(11): 1626~1629
[12] D. Peters, K. Fischer, J. Müller. Integrated optical based on silicon oxynitride thin films deposited on siliconsubstrates for sensor applications. Sensors and Actuators (A), 1991, 26(1-3): 425~431
[13] S. Koh, H. W. Carter, J. T. Boyd. Synchronous global clock distribution on multichip modules using optical waveguides. Opt. Engng., 1994, 33(5): 1587~1595
[15] S. Valette, J. P. Jadot, P. Gidon et al.. Si-based integrated optics technologies. Solid State Technol., 1989, 32(2): 69~75
[16] T. Baak. Siliconoxynitride: A material for GRIN optics. Appl. Opt., 1982, 21(8): 1069~1070