• Acta Optica Sinica
  • Vol. 18, Issue 6, 808 (1998)
[in Chinese]1, [in Chinese]1, [in Chinese]2, [in Chinese]2, and [in Chinese]3
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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. A Study of Properties of Optical Guided-Wave Structure Based on Silicon[J]. Acta Optica Sinica, 1998, 18(6): 808 Copy Citation Text show less
    References

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    [3] B. L. Weiss, G. T. Reed, S. K. Ioh et al.. Optical waveguides in SIMOX structures. Photon. Technolo. Lett., 1991, 3(1): 19~21

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    [9] K. Kapser, C. Wagner, P. Deimel et al.. Rapid deposition of high-quality silicon-oxynitride waveguides. IEEE Photon. Techno. Lett., 1991, 3(12): 1096~1098

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    [11] W. Gleine, J. Muller. Laser triming of SiON components for integrated optics. J. Lightwave Technol., 1991, 9(11): 1626~1629

    [12] D. Peters, K. Fischer, J. Müller. Integrated optical based on silicon oxynitride thin films deposited on siliconsubstrates for sensor applications. Sensors and Actuators (A), 1991, 26(1-3): 425~431

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    [15] S. Valette, J. P. Jadot, P. Gidon et al.. Si-based integrated optics technologies. Solid State Technol., 1989, 32(2): 69~75

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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. A Study of Properties of Optical Guided-Wave Structure Based on Silicon[J]. Acta Optica Sinica, 1998, 18(6): 808
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