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    Journals >Acta Optica Sinica >Volume 30 >Issue 4 >Page 1041 > Article
    • Acta Optica Sinica
    • Vol. 30, Issue 4, 1041 (2010)
    Probe Spot Position Error on the Accuracy of Focusing and Leveling Measurement System
    Liao Feihong1、*, Li Xiaoping1, Chen Xuedong1, and Li Zhidan2
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  • 1[in Chinese]
  • 2[in Chinese]
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    DOI: 10.3788/aos20103004.1041 Cite this Article Set citation alerts
    Liao Feihong, Li Xiaoping, Chen Xuedong, Li Zhidan. Probe Spot Position Error on the Accuracy of Focusing and Leveling Measurement System[J]. Acta Optica Sinica, 2010, 30(4): 1041 Copy Citation Text show less
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    Article index updated: May. 27, 2024
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    Liao Feihong, Li Xiaoping, Chen Xuedong, Li Zhidan. Probe Spot Position Error on the Accuracy of Focusing and Leveling Measurement System[J]. Acta Optica Sinica, 2010, 30(4): 1041
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