Several methods of measuring the refractive index of the film

[in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]

Journals >Chinese Journal of Quantum Electronics >Volume 22 >Issue 1 >Page 13 > Article

Chinese Journal of Quantum Electronics
Vol. 22, Issue 1, 13 (2005)

Several methods of measuring the refractive index of the film

[in Chinese]^1、*, [in Chinese]¹, [in Chinese]¹, [in Chinese]¹, and [in Chinese]²

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¹[in Chinese]

²[in Chinese]

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DOI: Cite this Article

[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Several methods of measuring the refractive index of the film[J]. Chinese Journal of Quantum Electronics, 2005, 22(1): 13 Copy Citation Text

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Abstract

It is important to measure the refractive index of the film precisely for designing and fabricating integrated optical devices. Several methods of measuring the refractive index were introduced and their principles and features were analysed.

Keywords

ellipisometry polymer thin films quasi-waveguide refractive index thin film optics

[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Several methods of measuring the refractive index of the film[J]. Chinese Journal of Quantum Electronics, 2005, 22(1): 13

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