Research on High Energy Efficiency Pupil Correction Based on Multi-ring Partition in Photolithography Machine

Siyu Zhu; Baoxi Yang; Xiaozhe Ma; Fang Zhang; Weilin Cheng; Zhiyuan Niu; Huijie Huang

doi:10.3788/CJL202148.1704001

Journals >Chinese Journal of Lasers >Volume 48 >Issue 17 >Page 1704001 > Article

Chinese Journal of Lasers
Vol. 48, Issue 17, 1704001 (2021)

Research on High Energy Efficiency Pupil Correction Based on Multi-ring Partition in Photolithography Machine

Siyu Zhu^1、2, Baoxi Yang^1、2, Xiaozhe Ma^1、2, Fang Zhang^1、**, Weilin Cheng¹, Zhiyuan Niu¹, and Huijie Huang^1、2、*

Author Affiliations

¹Laboratory of Information Optics and Optoelectronic Technology, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China

²Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China

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DOI: 10.3788/CJL202148.1704001 Cite this Article Set citation alerts

Siyu Zhu, Baoxi Yang, Xiaozhe Ma, Fang Zhang, Weilin Cheng, Zhiyuan Niu, Huijie Huang. Research on High Energy Efficiency Pupil Correction Based on Multi-ring Partition in Photolithography Machine[J]. Chinese Journal of Lasers, 2021, 48(17): 1704001 Copy Citation Text

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Fig. 1. Schematic diagram of illumination system for photolithography machine

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Schematic diagrams of region partitions of pupil characteristic parameters. (a) bHV and bQ45; (b) bX; (c) bY; (d) bST and bQ0

Fig. 2. Schematic diagrams of region partitions of pupil characteristic parameters. (a) b_HV and

b_{Q_{45}}

; (b) b_X; (c) b_Y; (d) b_ST and

b_{Q_{0}}

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Fig. 3. Schematic diagram of tangential 8 partitions of pupil

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Fig. 4. Schematic diagram of selected process for optimal reference value of energy

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Fig. 5. Schematic diagram of radial multi-ring partition of pupil

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Fig. 6. Flow chart of high energy efficiency pupil correction method based on radial multi-ring partition

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Fig. 7. Distributions of fields of view in illumination light field

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Fig. 8. Pupil diagrams of illumination modes with different coherent factors in central field of view. (a) A₁; (b) A₂; (c) A₃; (d) Q₁; (e) Q₂; (f) Q₃

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Fig. 9. Comparisons of pupil characteristic parameters before and after correction of illumination mode A₃ . (a) Ellipticity; (b) pole balance in X direction; (c) pole balance in Y direction; (d) pole balance in four quadrants

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Fig. 10. Comparisons of pupil characteristic parameters before and after correction of illumination mode Q₃. (a) Ellipticity; (b) pole balance in X direction; (c) pole balance in Y direction; (d) pole balance in four quadrants

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Illumination modes	Inner coherent factor	Outer coherent factor	Ellipticity	Pole balance in X direction	Pole balance in Y direction	Pole balance in four quadrants
A₁	0.20	0.44	3.26	0.30	1.75	2.04
A₂	0.47	0.72	5.12	0.07	1.82	2.13
A₃	0.54	0.83	5.63	0.08	1.80	1.89
Q₁	0.20	0.44	0.88	0.79	1.39	2.17
Q₂	0.36	0.60	0.91	1.25	2.36	3.60
Q₃	0.64	0.88	0.76	3.43	1.29	4.73
Target requirement			3.00	3.00	3.00	4.00

Table 1. Coherent factors of 6 kinds of illumination modes and the maximum value of characteristic parameters of uncorrected pupils in each field of view

Method	Illumination mode	Region 1	Region 2	Region 3	Region 4	Region 5	Region 6	Region 7	Region 8
Traditional method	A₁	0.9515	1.0000	0.9892	0.9550	0.9346	0.9407	0.9434	0.9249
	A₂	0.9219	0.9890	1.0000	0.9340	0.9045	0.9454	0.9406	0.9293
	A₃	0.9201	0.9881	1.0000	0.9298	0.9056	0.9531	0.9371	0.9329
Multi-ring method	M₁	0.9838	1.0000	1.0000	0.9698	0.9593	0.9609	0.9609	0.9603
	M₂	0.9709	1.0000	1.0000	0.9872	0.9518	1.0000	0.9978	0.9847
	M₃	0.9685	1.0000	1.0000	0.9763	0.9612	1.0000	0.9837	0.9793

Table 2. Transmittances of two kinds of pupil correction plates at annular illumination modes

Method	Illumination mode	Ellipticity	Pole balance in X direction	Pole balance in Y direction	Pole balance in four quadrants	Energy loss
Method	Illumination mode	b_HV /%	b_X /%	b_Y /%	$b_{Q_{0}}$ /%	${E_{L}}_{j}$ /%
Traditional method	A₁	0.64					0.31	0.20	0.49	4.54
	A₂	0.42					0.08	0.22	0.49	5.54
	A₃	0.84					0.19	0.42	0.95	5.52
Multi-ring method	A₁	2.26					0.16	0.72	0.89	1.98
	A₂	2.15					0.06	1.30	1.42	2.06
	A₃	2.35					0.12	1.26	1.47	2.21

Table 3. Correction results of two kinds of pupils at annular illumination modes

Method	Illuminationmode	Region 1	Region 2	Region 3	Region 4	Region 5	Region 6	Region 7	Region 8
Traditional method	Q₁	1.0000	1.0000	1.0000	1.0000	1.0000	1.0000	1.0000	1.0000
	Q₂	1.0000	1.0000	1.0000	1.0000	1.0000	1.0000	1.0000	1.0000
	Q₃	0.9441	0.9441	0.9916	0.9916	1.0000	1.0000	0.9454	0.9454
Multi-ring method	M₁	1.0000	1.0000	1.0000	1.0000	1.0000	1.0000	1.0000	1.0000
	M₂	1.0000	1.0000	1.0000	1.0000	1.0000	1.0000	1.0000	1.0000
	M₃	0.9543	0.9543	1.0000	1.0000	1.0000	1.0000	0.9712	0.9712

Table 4. Transmittances of two kinds of pupil correction plates at quadrupole illumination modes

Method	Illumination modes	Ellipticity	Pole balance in X direction	Pole balance in Y direction	Pole balance in four quadrants	Energy loss
Method	Illumination modes	b_ST /%	b_X /%	b_Y /%	$b_{Q_{45}}$ /%	${E_{L}}_{j}$ /%
Traditional method	Q₁	0.88					0.79	1.39	2.17	0.00
	Q₂	0.91					1.25	2.36	3.60	0.00
	Q₃	0.48					0.80	1.05	1.86	3.06
Multi-ring method	Q₁	0.87					0.76	1.39	2.13	0.03
	Q₂	0.89					1.21	2.35	3.55	0.04
	Q₃	1.28					2.53	1.04	3.59	0.93

Table 5. Correction results of two kinds of pupils at quadrupole illumination modes

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