Research on High Energy Efficiency Pupil Correction Based on Multi-ring Partition in Photolithography Machine

Siyu Zhu; Baoxi Yang; Xiaozhe Ma; Fang Zhang; Weilin Cheng; Zhiyuan Niu; Huijie Huang

doi:10.3788/CJL202148.1704001

Journals >Chinese Journal of Lasers >Volume 48 >Issue 17 >Page 1704001 > Article

Chinese Journal of Lasers
Vol. 48, Issue 17, 1704001 (2021)

Research on High Energy Efficiency Pupil Correction Based on Multi-ring Partition in Photolithography Machine

Siyu Zhu^1、2, Baoxi Yang^1、2, Xiaozhe Ma^1、2, Fang Zhang^1、**, Weilin Cheng¹, Zhiyuan Niu¹, and Huijie Huang^1、2、*

Author Affiliations

¹Laboratory of Information Optics and Optoelectronic Technology, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China

²Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China

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DOI: 10.3788/CJL202148.1704001 Cite this Article Set citation alerts

Siyu Zhu, Baoxi Yang, Xiaozhe Ma, Fang Zhang, Weilin Cheng, Zhiyuan Niu, Huijie Huang. Research on High Energy Efficiency Pupil Correction Based on Multi-ring Partition in Photolithography Machine[J]. Chinese Journal of Lasers, 2021, 48(17): 1704001 Copy Citation Text

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