• Infrared and Laser Engineering
  • Vol. 47, Issue 7, 717001 (2018)
Li Xinghua*, Xing Yanlei, Fang Fengzhou, Liu Peilu, and Su Zhikun
Author Affiliations
  • [in Chinese]
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    DOI: 10.3788/irla201847.0717001 Cite this Article
    Li Xinghua, Xing Yanlei, Fang Fengzhou, Liu Peilu, Su Zhikun. Multi-parameter measurement method based on combined surface reference[J]. Infrared and Laser Engineering, 2018, 47(7): 717001 Copy Citation Text show less
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    [9] Fang Fengzhou, Wan Yu, Zhu Pengzhe, et al. Dimensional displacement measurement system based on optical free surface[J]. Journal of Tianjin University, 2014, 47(10): 934-942. (in Chinese)

    [10] Shimizu Y, Tan S L, Murata D, et al. Ultra-sensitive angle sensor based on laser auto-collimation for measurement of stage tilt motions[J]. Optics Express, 2016, 24(3): 2788-2805.

    [11] Gao W, Kimura A. A three-axis displacement sensor with nanometric resolution[J]. CIRP Annals-Manufacturing Technology, 2007, 56(1): 529-532.

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    Li Xinghua, Xing Yanlei, Fang Fengzhou, Liu Peilu, Su Zhikun. Multi-parameter measurement method based on combined surface reference[J]. Infrared and Laser Engineering, 2018, 47(7): 717001
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