Sensitivity analysis of different scan arcs for swing arm profilometer test

Xiong Ling; Luo Xiao; Qi Erhui; Zhang Feng; Xue Donglin; Zhang Xuejun

doi:10.3788/irla201847.0217003

[1] Anderson D S, Parks R E. A versatile profilometer for the measurement of aspherics [C]//OF&T Workshop Technical Digest, CA, 1990.

[2] Anderson D S, Burge J H. Swing-arm profilometry of aspherics [C]//Proc SPIE, 1995, 2536: 169-179.

[3] Su P, Oh C J, Parks R E, et al. Swing arm optical CMM for aspherics [C]//Proc SPIE, 2009, 7426: 74260J.

[4] Burge J H. Fabrication and testing of 1.4-m convex off-axis aspheric optical surfaces [C]//Proc SPIE, 2009, 7426: 7426L.

[5] Zhang Peng, Li Jie, Yu Guoyu, et al. Development of swinging part profilometer for optics[C]//Optics and Measurement 2016 International Conference, 2016: 101510B.

[6] Wei Zhongwei. Study on the error separation for the rotary table of swing arm profilometer[D]. Chengdu: Institute of Optics and Electronics, Chinese Academy of Sciences, 2014: 38-39. (in Chinese)

[7] Lin Chen, Jing Hongwei, Wei Zhongwei, et al. Research on the measurement technology of effective arm length of swing arm profilometer [C]//Proc SPIE, 2014, 9280: 92800P.

[8] Gao Mingxing, Jing Hongwei, Fan Tianquan, et al. Calibrating the axes of the swing arm profilometer by the four-based laser trackers[C]//Proc SPIE, 2015, 9623: 96230M.

[9] Jia Lide, Zheng Ziwen, Dai Yifan, et al. Principle and experiments of swing-arm profilometer[J]. Optics and Precision Engineering, 2007, 15(4): 499-504. (in Chinese)

[10] Qi Erhui, Luo Xiao, Zheng Ligong, et al. Optical testing of large optical flat mirror with non-circular pupil based on scanning pentaprism technology [J]. Journal of Optoelectronics Laser, 2014, 25(7): 1370-1375. (in Chinese)

[11] Qi Erhui, Luo Xiao, Li Ming, et al. Error analysis of scanning pentaprism system in optical testing on large aperture flat mirror.[J] Infrared and Laser Engineering, 2015, 44(2): 639-646. (in Chinese)

[12] Xiong Ling, Luo Xiao, Liu Zhenyu, et al. Measurement of 2 m SiC aspheric mirror based on swing arm profilometer[J]. Acta Optica Sinica, 2015, 35(12): 1212002. (in Chinese)