Laser trimming of the operating wavelength of silicon nitride racetrack resonators

Greta De Paoli; Senta L. Jantzen; Thalia Dominguez Bucio; Ilias Skandalos; Christopher Holmes; Peter G. R. Smith; Milan M. Milosevic; Frederic Y. Gardes

doi:10.1364/PRJ.382529

[1] X. Chen, M. M. Milosevic, S. Stankovic, S. Reynolds, T. Dominguez Bucio, K. Li, D. J. Thomson, F. Y. Gardes, G. T. Reed. The emergence of silicon photonics as a flexible technology platform. Proc. IEEE, 106, 2101-2116(2018).

[2] P. J. Roberts, F. Couny, H. Sabert, B. J. Mangan, D. P. Williams, L. Farr, M. W. Mason, A. Tomlinson, T. A. Birks, J. C. Knight, P. St.J. Russell. Ultimate low loss of hollow-core photonic crystal fibres. Opt. Express, 13, 236-244(2005).

[3] Z. Li, A. M. Heidt, J. M. O. Daniel, Y. Jung, S. U. Alam, D. J. Richardson. Thulium-doped fiber amplifier for optical communications at 2 μm. Opt. Express, 21, 9289-9297(2013).

[4] R. Kitamura, L. Pilon, M. Jonasz. Optical constants of silica glass from extreme ultraviolet to far infrared at near room temperature. Appl. Opt., 46, 8118-8133(2007).

[5] G. Z. Mashanovich, M. M. Milosevic, M. Nedeljkovic, N. Owens, B. Xiong, E. J. Teo, Y. Hu. Low loss silicon waveguides for the mid-infrared. Opt. Express, 19, 7112-7119(2011).

[6] M. M. Milosevic, M. Nedeljkovic, T. M. Ben Masaud, E. Jaberansary, H. M. Chong, N. G. Emerson, G. T. Reed, G. Z. Mashanovich. Silicon waveguides and devices for the mid-infrared. Appl. Phys. Lett., 101, 121105(2012).

[7] J. J. Ackert, D. J. Thomson, L. Shen, A. C. Peacock, P. E. Jessop, G. T. Reed, G. Z. Mashanovich, A. P. Knights. High-speed detection at two micrometres with monolithic silicon photodiodes. Nat. Photonics, 9, 393-396(2015).

[8] G. T. Reed, G. Z. Mashanovich, F. Y. Gardes, M. Nedeljkovic, Y. Hu, D. J. Thomson, K. Li, P. R. Wilson, S. W. Chen, S. S. Hsu. Recent breakthroughs in carrier depletion based silicon optical modulators. Nanophotonics, 3, 229-245(2014).

[9] D. E. Hagan, A. P. Knights. Mechanisms for optical loss in SOI waveguides for mid-infrared wavelengths around 2 μm. J. Opt., 19, 025801(2017).

[10] Z. Liu, Y. Chen, Z. Li, B. Kelly, R. Phelan, J. O’Carroll, T. Bradley, J. P. Wooler, N. V. Wheeler, A. M. Heidt, T. Richter, C. Schubert, M. Becker, F. Poletti, M. N. Petrovich, S. Alam, D. J. Richardson, R. Slavík. High-capacity directly modulated optical transmitter for 2 μm spectral region. J. Lightwave Technol., 33, 1373-1379(2015).

[11] R. Soref. Mid-infrared photonics in silicon and germanium. Nat. Photonics, 4, 495-497(2010).

[12] R. Hainberger, P. Muellner, E. Melnik, G. Mutinati, M. Eggeling, A. Maese-Novo, F. Vogelbacher, J. Kraft, G. Koppitsch, G. Meinhardt, F. Schrank. Silicon nitride waveguide integration platform for medical diagnostic applications. Progress in Electromagnetic Research Symposium (PIERS), 781(2016).

[13] P. T. Lin, V. Singh, L. Kimerling, A. M. Agarwal. Planar silicon nitride mid-infrared devices. Appl. Phys. Lett., 102, 251121(2013).

[14] A. Rahim, E. Ryckeboer, A. Z. Subramanian, B. Kuyken, A. Dhakal, A. Raza, A. Hermans, M. Muneeb, Y. Li, U. Dave, P. Bienstman, N. L. Thomas. Expanding the silicon photonics portfolio with silicon nitride photonic integrated circuits. J. Lightwave Technol., 35, 639-649(2017).

[15] T. Dominguez Bucio, A. Z. Khokhar, C. Lacava, S. Stankovic, G. Z. Mashanovich, P. Petropoulos, F. Y. Gardes. Material and optical properties of low-temperature NH₃-free PECVD SiN_x layers for photonic applications. J. Phys. D, 50, 025106(2017).

[16] T. D. Bucio, C. Lacava, M. Clementi, J. Faneca, I. Skandalos, A. Baldycheva, M. Galli, K. Debnath, P. Petropoulos, F. Y. Gardes. Silicon nitride photonics for the near-infrared. IEEE J. Sel. Top. Quantum Electron., 26, 8200613(2020).

[17] J. F. Bauters, M. J. R. Heck, D. D. John, S. Jonathon, C. M. Bruinink, A. Leinse, R. G. Heideman, J. Daniel, J. E. Bowers. Planar waveguides with less than 0.1 dB/m propagation loss fabricated with wafer bonding. Opt. Express, 19, A1272-A1278(2011).

[18] Y.-D. Yang, Y. Li, Y.-Z. Huang, A. W. Poon. Silicon nitride three-mode division multiplexing and wavelength-division multiplexing using asymmetrical directional couplers and microring resonators. Opt. Express, 22, 22172-22183(2014).

[19] Q. Liu, X. Tu, K. Woo, J. Sheng, Y. Shin, K. Han, Y.-J. Yoon, G.-Q. Lo, M. Kyoung. Chemical highly sensitive Mach-Zehnder interferometer biosensor based on silicon nitride slot waveguide. Sens. Actuators B, 188, 681-688(2013).

[20] Y. Okawachi, K. Saha, J. S. Levy, Y. H. Wen, M. Lipson, A. L. Gaeta. Octave-spanning frequency comb generation in a silicon nitride chip. Opt. Lett., 36, 3398-3400(2011).

[21] A. R. Johnson, A. S. Mayer, A. Klenner, K. Luke, E. S. Lamb, M. R. E. Lamont, C. Joshi, Y. Okawachi, F. W. Wise, M. Lipson, U. Keller, A. L. Gaeta. Octave-spanning coherent supercontinuum generation in a silicon nitride waveguide. Opt. Lett., 40, 5117-5120(2015).

[22] B. E. Little, S. T. Chu, H. A. Haus, J. Foresi, J. P. Laine. Microring resonator channel dropping filters. J. Lightwave Technol., 15, 998-1005(1997).

[23] I. Kiyat, A. Aydinli, N. Dagli. Low-power thermooptical tuning of SOI resonator switch. IEEE Photon. Technol. Lett., 18, 364-366(2006).

[24] Q. Xu, B. Schmidt, S. Pradhan, M. Lipson. Micrometre-scale silicon electro-optic modulator. Nature, 435, 325-327(2005).

[25] Y. Sun, X. Fan. Optical ring resonators for biochemical and chemical sensing. Anal. Bioanal. Chem., 399, 205-211(2011).

[26] A. V. Krishnamoorthy, R. Ho, X. Zheng, H. Schwetman, J. Lexau, P. Koka, G. Li, I. Shubin, J. E. Cunningham. Computer systems based on silicon photonic interconnects. Proc. IEEE, 97, 1337-1361(2009).

[27] V. Raghunathan, W. N. Ye, J. Hu, T. Izuhara, J. Michel, L. Kimerling. Athermal operation of silicon waveguides: spectral, second order and footprint dependencies. Opt. Express, 18, 17631-17639(2010).

[28] M. M. Milosevic, X. Chen, W. Cao, A. F. Runge, Y. Franz, C. G. Littlejohns, S. Mailis, A. C. Peacock, D. J. Thomson, G. T. Reed. Ion implantation in silicon for trimming the operating wavelength of ring resonators. IEEE J. Sel. Top. Quantum Electron., 24, 8200107(2018).

[29] X. Chen, M. M. Milosevic, D. J. Thomson, A. Z. Khokhar, Y. Franz, A. F. Runge, S. Mailis, A. C. Peacock, G. T. Reed. Post-fabrication phase trimming of Mach-Zehnder interferometers by laser annealing of germanium implanted waveguides. Photon. Res., 5, 578-582(2017).

[30] B. Chen, X. Yu, X. Chen, M. M. Milosevic, D. J. Thomson, A. Z. Khokhar, S. Saito, O. L. Muskens, G. T. Reed. Real-time monitoring and gradient feedback enable accurate trimming of ion-implanted silicon photonic devices. Opt. Express, 26, 24953-24963(2018).

[31] J. J. Ackert, J. K. Doylend, D. F. Logan, P. E. Jessop, R. Vafaei, A. P. Knights. Defect-mediated resonance shift of silicon-on-insulator racetrack resonators. Opt. Express, 19, 11969-11976(2011).

[32] T. Fan, Z. Xia, A. Adibi, A. A. Eftekhar. Highly-uniform resonator-based visible spectrometer on a Si₃N₄ platform with robust and accurate post-fabrication trimming. Opt. Lett., 43, 4887-4890(2018).

[33] Y. Shen, I. B. Divliansky, D. N. Basov, S. Mookherjea. Perfect set-and-forget alignment of silicon photonic resonators and interferometers. Optics InfoBase Conference, 1-3(2011).

[34] D. H. Geuzebroek, E. J. Klein, H. Kelderman, F. S. Tan, D. J. W. Klunder, A. Driessen. Thermally tuneable, wide FSR switch based on micro-ring resonators. Proceedings Symposium IEEE/LEOS Benelux Chapter, 155-158(2002).

[35] A. Guarino, G. Poberaj, D. Rezzonico, R. Degl’Innocenti, P. Günter. Electro-optically tunable microring resonators in lithium niobate. Nat. Photonics, 1, 407-410(2007).

[36] J. K. Doylend, D. F. Logan, R. Vafaei, A. P. Knights, L. Chrostowski, J. J. Ackert, P. E. Jessop. Defect-mediated resonance shift of silicon-on-insulator racetrack resonators. Opt. Express, 19, 11969-11976(2011).

[37] L. Zhou, K. Okamoto, S. J. B. Yoo. Athermalizing and trimming of slotted silicon microring resonators with UV-sensitive PMMA upper-cladding. IEEE Photon. Technol. Lett., 21, 1175-1177(2009).

[38] D. K. Sparacin, C.-Y. Hong, L. C. Kimerling, J. Michel, J. P. Lock, K. K. Gleason. Trimming of microring resonators by photo-oxidation of a plasma-polymerized organosilane cladding material. Opt. Lett., 30, 2251-2253(2005).

[39] D. K. Sparacin, J. P. Lock, C.-Y. Hong, K. K. Gleason, L. C. Kimerling, J. Michel. Trimming of silicon nitride microring resonators with a polysilane top cladding. IEEE International Conference on Group IV Photonics, 117-119(2005).

[40] A. Canciamilla, F. Morichetti, S. Grillanda, P. Velha, M. Sorel, V. Singh, A. Agarwal, L. C. Kimerling, A. Melloni. Photo-induced trimming of chalcogenide-assisted silicon waveguides. Opt. Express, 20, 15807-15817(2012).

[41] J. Schrauwen, D. V. Thourhout, R. Baets. Trimming of silicon ring resonator by electron beam induced compaction and strain. Opt. Express, 16, 3738-3743(2008).

[42] S. Ueno, T. Naganawa, Y. Kokubun. High UV sensitivity of SiON film and its application to center wavelength trimming of microring resonator filter. IEICE Trans. Electron., E88-C, 998-1004(2005).

[43] H. Haeiwa, T. Naganawa, Y. Kokubun. Wide range center wavelength trimming of vertically coupled microring resonator filter by direct UV irradiation to SiN ring core. IEEE Photon. Technol. Lett., 16, 135-137(2004).

[44] G. Piccoli, M. Bernard, M. Ghulinyan. Permanent mitigation of loss in ultrathin silicon-on-insulator high-Q resonators using ultraviolet light. Optica, 5, 1271-1278(2018).

[45] S. L. Scholl, A. Jantzen, R. H. S. Bannerman, P. C. Gow, D. H. Smith, J. C. Gates, L. J. Boyd, P. G. R. Smith, C. Holmes. Thermal approach to classifying sequentially written fiber Bragg gratings. Opt. Lett., 44, 703-706(2019).

[46] C. Holmes, P. A. Cooper, H. N. J. Fernando, A. Stroll, J. C. Gates, C. Krishnan, R. Haynes, P. L. Mennea, L. G. Carpenter, C. B. E. Gawith, M. M. Roth, M. D. Charlton, P. G. R. Smith. Direct UV written planar Bragg gratings that feature zero fluence induced birefringence. Meas. Sci. Technol., 26, 125006(2015).

[47] C. Holmes, J. C. Gates, L. G. Carpenter, H. L. Rogers, R. M. Parker, P. A. Cooper, S. Chaotan, F. R. M. Adikan, C. B. E. Gawith, P. G. R. Smith. Direct UV-written planar Bragg grating sensors. Meas. Sci. Technol., 26, 112001(2015).

[48] Z. Yin, F. W. Smith. Free-energy model for bonding in amorphous covalent alloys. Phys. Rev. B, 43, 4507-4510(1991).

[49] J. J. Mei, H. Chen, W. Z. Shen, H. F. Dekkers. Optical properties and local bonding configurations of hydrogenated amorphous silicon nitride thin films. J. Appl. Phys., 100, 073516(2006).

[50] I. Parkhomenko, L. Vlasukova, F. Komarov, O. Milchanin, M. Makhavikou, A. Mudryi, V. Zhivulko, J. Żuk, P. Kopyciński, D. Murzalinov. Origin of visible photoluminescence from Si-rich and N-rich silicon nitride films. Thin Solid Films, 626, 70-75(2017).

[51] H. Charifi, A. Slaoui, J. P. Stoquert, H. Chaib, A. Hannour. Opto-structural properties of silicon nitride thin films deposited by ECR-PECVD. World J. Condens. Matter Phys., 6, 7-16(2016).

[52] J. Teng, P. Dumon, W. Bogaerts, H. Zhang, X. Jian, M. Zhao, G. Morthier, R. Baets. Athermal SOI ring resonators by overlaying a polymer cladding on narrowed waveguides. IEEE International Conference on Group IV Photonics GFP, 77-79(2009).

[53] https://doi.org/10.5258/SOTON/D1219. https://doi.org/10.5258/SOTON/D1219