Zhi-Qiang Zhang, Bin Liao, Yi-Xiang Ou, Feng-Shou Zhang, Xu Zhang, Yong-Qing Shen, Shu-Nian Chen, Qing-Song Hua, Guang-Yu He, Xiao-Ping Ouyang. Thick yet tough TiN coatings deposited by filter cathode vacuum arc technology [J]. Acta Physica Sinica, 2020, 69(10): 108103-1
- Acta Physica Sinica
- Vol. 69, Issue 10, 108103-1 (2020)
Fig. 1. The schematic diagram of FCVAD system.
Fig. 2. Schematic diagram of preparation process of thick TiNcoating.
Fig. 3. The evolution of thickness of TiN coatings with deposition time.
Fig. 4. (a) XRD patterns of all of the TiN coatings with different deposition time; (b) the grain size of all of the TiN coatings with different deposition time; (c) XRD patterns of TiN-125 coating.
Fig. 5. XPS spectta of N 1s of TiN-125 coating.
Fig. 6. The AFM and roughness of all of the TiN coatings with different deposition time: (a) 125 min; (b) 150 min; (c) 190 min; (d) 210 min; (e) 270 min; (f) roughness of all of the TiN coatings.
Fig. 7. Cross-sectional SEM micrographsof TiN coatings with different deposition time: (a) 125 min; (b) 150 min; (c) 190 min; (d) 210 min; (e) 270 min.
Fig. 8. Hardness and elastic modulus of TiN coatings with different depositiontime.
Fig. 9. 
and
value of TiN coatings with different deposition time.
and
value of TiN coatings with different deposition time. Fig. 10. SEM images of HRC indents of different TiN coatings. (a) TiN-125; (b) TiN-150; (c) TiN-190; (d) TiN-210; (e) TiN-270
Fig. 11. Theevolutionofinternalstress of TiN coatings with different deposition time.
Fig. 12. (a) The evolution of coefficient of friction of TiN coatings with testing time; (b) wear rate of TiN coatings with different deposition time.
Fig. 13. SurfacewearmorphologyofdifferentTiNcoatings.
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