• Laser & Optoelectronics Progress
  • Vol. 52, Issue 1, 13101 (2015)
Yang Yongliang1、*, Yue Li1, Li Na1, and Tang Haolong2
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    DOI: 10.3788/lop52.013101 Cite this Article Set citation alerts
    Yang Yongliang, Yue Li, Li Na, Tang Haolong. Study on the Properties of DLC Films with Si Doping Prepared by Rf-PECVD[J]. Laser & Optoelectronics Progress, 2015, 52(1): 13101 Copy Citation Text show less
    References

    [1] Yu Tianyan, Zhu Furong, Liu Dingquan, et al.. Design and deposition of broadband IR antireflection coatings on ZnS lenses[J]. Acta Optica Sinica, 2005, 25(2): 270-273.

    [2] Luo Le, Zhang Junfang, Fang Xiaodong. Influence of the laser pulsed energy upon the diamond-like carbon film and its infrared property[J]. Chinese J Lasers, 2010, 37(12): 3121-3123.

    [3] Li Xiaowei, Zhou Yi, Sun Lili, et al.. Determination chemical bond of tetrahedral amorphous carbon film by ellipsometry approach[J]. Acta Optica Sinica, 2012, 32(10): 1031005.

    [4] Wang Jing, Liu Guichang, Ji Dapeng, et al.. Diamond-like carbon (DLC) films deposited on copper substrate through preparation of intermediate layers[J]. Journal of Physics, 2006, 55(7): 3748-3754.

    [5] Xu Junqi, Li Chuanzhi, Yan Yixin, et al.. Effect of annealing on structure and properties of Ti-doped hydrogen-free DLC films[J]. Vacuum, 2009, 46(2): 30-32.

    [6] Xue Qunji, Wang Liping, Chen Xiaoming, et al.. Film Material of DLC[M]. Beijing: Science Press, 2012.

    [7] S S Camargo Jr, R A Santosa, A L Baia Neto, et al.. Structural modications and temperature stability of silicon incorporated diamond-like a-C:H flms[J]. Thin Solid Films, 1998, 332(1): 130-135.

    [8] Pan Yongqiang, Hang Lingxia, Liang Haifeng, et al.. Ultrabroad band and hard infrared Antireflection coatings on ZnSe for 2~16 μm [J]. Acta Optica Sinica, 2010, 30(4): 1201-1202.

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    [1] Yang Yongliang, Zhang Hongyun, Yue Li, Li Na, Zeng Fanju, Fu Xiuhua. Anti-Tarnishing Property of TiO2 Thin Film on Silver Ornaments During Batch Processing[J]. Laser & Optoelectronics Progress, 2017, 54(3): 33102

    [2] Sui Xiaole, Xiao Xia, Qi Haiyang, Kong Tao. Influence of Residual Stress on Young Modulus Detection of SiO2 Bulk Materials by Laser-Induced Surface Ultrasonic Wave Technique[J]. Laser & Optoelectronics Progress, 2017, 54(12): 121202

    Yang Yongliang, Yue Li, Li Na, Tang Haolong. Study on the Properties of DLC Films with Si Doping Prepared by Rf-PECVD[J]. Laser & Optoelectronics Progress, 2015, 52(1): 13101
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