Qiang Zhang, Dan Fang, Xiaoyu Qi, Han Li. Analysis of High-Resolution X-Ray Diffraction for InAs/GaSb Superlattice[J]. Laser & Optoelectronics Progress, 2021, 58(23): 2316004
- Laser & Optoelectronics Progress
- Vol. 58, Issue 23, 2316004 (2021)
Fig. 1. Structural diagrams of the first group of samples with the same thickness and different periods. (a) Sample 1; (b) sample 2
Fig. 2. Structural diagrams of the second group of samples with the same thickness and different periods. (a) Sample 3; (b) sample 4
Fig. 3. Simulation of samples. (a) Sample 1; (b) sample 2; (c) sample 3; (d) sample 4
Fig. 4. HRXRD curves of the first group of samples. (a) Sample 1; (b) sample 2
Fig. 5. AFM morphologies of the first group of samples. (a) Sample 1; (b) sample 2
Fig. 6. HRXRD curves of the second group of samples. (a) Sample 3; (b) sample 4
Fig. 7. AFM morphologies of the second group of samples. (a) Sample 3; (b) sample 4
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Table 1. Calculation parameters for two groups of samples
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