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    Journals >Acta Optica Sinica >Volume 32 >Issue 8 >Page 822005 > Article
    • Acta Optica Sinica
    • Vol. 32, Issue 8, 822005 (2012)
    Structure Design and Analysis of a New Type MEMS Fabry-Perot Filter
    Zhang Jianfei1、2、*, Zhuang Xuye1, Wang Weimin1, Tao Fenggang1、2, and Yao Jun1
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  • 1[in Chinese]
  • 2[in Chinese]
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    DOI: 10.3788/aos201232.0822005 Cite this Article Set citation alerts
    Zhang Jianfei, Zhuang Xuye, Wang Weimin, Tao Fenggang, Yao Jun. Structure Design and Analysis of a New Type MEMS Fabry-Perot Filter[J]. Acta Optica Sinica, 2012, 32(8): 822005 Copy Citation Text show less
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    Article index updated: May. 19, 2024
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    Zhang Jianfei, Zhuang Xuye, Wang Weimin, Tao Fenggang, Yao Jun. Structure Design and Analysis of a New Type MEMS Fabry-Perot Filter[J]. Acta Optica Sinica, 2012, 32(8): 822005
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