Large aperture diffractive optical elements (DOE) for quasi-annular beam shaping are development. Improved hybrid algorithms including self-iterative algorithm. Quasi-Gradient Descent algorithm and Fourier filtration have been used to design such DOE to form a 650 μm-diameter focal spot in uniform illumination. Hollowed-out mask and ion beam etching system are developed to fabricate the DOE. The performance of the DOE is experimentally studied with 1.064 μm pulsed laser. Wide focal spot with the corresponding size and sharp edge but great modulation are obtained even with large deviation from focus distance. The theoretical analysis with experiment conditions shows that the technical error may be the main reason for the modulation.