Fitting of Index Homogeneity Data on the Rectangle Pupil

LIAO Zhi-yuan; XING Ting-wen; LIU Zhi-xiang

doi:10.3969/j.issn.1003-501x.2011.11.026

Journals >Opto-Electronic Engineering >Volume 38 >Issue 11 >Page 146 > Article

Opto-Electronic Engineering
Vol. 38, Issue 11, 146 (2011)

Fitting of Index Homogeneity Data on the Rectangle Pupil

LIAO Zhi-yuan^1、2、*, XING Ting-wen¹, and LIU Zhi-xiang¹

Author Affiliations

¹[in Chinese]

²[in Chinese]

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DOI: 10.3969/j.issn.1003-501x.2011.11.026 Cite this Article

LIAO Zhi-yuan, XING Ting-wen, LIU Zhi-xiang. Fitting of Index Homogeneity Data on the Rectangle Pupil[J]. Opto-Electronic Engineering, 2011, 38(11): 146 Copy Citation Text

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References

[2] Mahajan V N，Dai G M. 2007 Orthonormal polynomials in wavefront analysis：analytical solution [J]. Opt. Soc. Am(S1084-7529)，2007，24：2994-3016.

[6] Thomas Westerhoff，Konrad Knapp. Optical materials for microlithography applications [J]. Proc. of SPIE(S0277-786X)， 1998，3424：10-19.

[7] Doerte Schoenfeld，Bodo Kuehn. How to measure sub-ppm optical homogeneity in fused silica：impact of temperature on accuracy and reproducibility [J]. Proc. of SPIE(S0277-786X)，2001，4449：102-110.

[8] DOrband B. High precision testing of optical components [J]. Proc. of SPIE(S0277-786X)，1998，3482：484-489.

[9] Grabosch Guenter，Parthier Lutz. Strong improvement of critical parameters of CaF2 lens blanks for 193-nm and 157 nm lithography [J]. Proc. of SPIE(S0277-786X)，2004，5377：1781-1786.

[10] Baoliang (Bob) Wang. An improved method for measuring low-level linear birefringence in optical materials [J]. Proc. of SPIE(S0277-786X)，1998，3423：120-124.

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LIAO Zhi-yuan, XING Ting-wen, LIU Zhi-xiang. Fitting of Index Homogeneity Data on the Rectangle Pupil[J]. Opto-Electronic Engineering, 2011, 38(11): 146

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