[2] WOOD R A.High-performance infrared thermal imaging with monolithic silicon focal planes operating at room temperature[J].IEDM Tech Dig,1993:175-177.

[3] DONG Liang,YUE Rui-feng,LIU Li-tian.An uncooled microbolometer infrared detector based on poly-SiGe thermistor[J].Sensors and Actuators,2003,105(3):286-292.

[4] ZENG W J,KARUNASIRI G,CHUA S J.Fabrication of microbolometer infrared focal plane array[C]//Proceeding of MINDEF-NUS Jiont R &D Seminar,1997,8:148-151.

[5] LEE H K,YOON J B,YOON E,et al.A high fill-factor Infrared bolometer using micromachined multilevel electrothermal structure[J].IEEE Transaction on Electron Deviges,1999,46(7):1489-1492.

[6] NODA M,HASHIMOTO K,KUBO R,et al.A new type of dielectric bolometer mode of detector pixel using ferroelectrics thin film capacitors for infrared image sensor[J].Sensors and Actuators A,1999,77:39-44.

[7] DONG L,YUE R F,LIU L T,et al.Freestanding a-Si thin film transistor for room-temperature infrared detection[J].Chinese Phys Lett,2004,21(2):262-265.

[8] LIDDIARD K C.Thin film resistance bolometer IR detectors[J].Infrared Phy,1984,24:57-61.

[9] LEE H K,YOON J B,YOON E,et al.A high fill-factor Infrared bolometer using micromachined multilevel electrothermal structures[J].IEEE Transaction on Electron Devices,1999,46(7):1489-1491.

[10] IGNATIEV A,XU Y Q,WU N J,et al.Pyroelectric,ferroelectric and dielectric properties of Mn and Sb-doped PZT thin films for uncooled IR detectors[J].Materials Science and Engineering B.1998,56:191-194.