• Acta Optica Sinica
  • Vol. 28, Issue 11, 2136 (2008)
Gan Shuyi1、2、*, Liu Zhengkun1, Xu Xiangdong1, Hong Yilin1, Liu Ying1, Zhou Hongjun1, Huo Tonglin1, and Fu Shaojun1
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • show less
    DOI: Cite this Article Set citation alerts
    Gan Shuyi, Liu Zhengkun, Xu Xiangdong, Hong Yilin, Liu Ying, Zhou Hongjun, Huo Tonglin, Fu Shaojun. Error Analysis for Reflectometer in National Synchrotron Radiation Laboratory[J]. Acta Optica Sinica, 2008, 28(11): 2136 Copy Citation Text show less

    Abstract

    The reflectometer in spectral radiation standard and metrology beamline of Hefei National Synchrotron Radiation Laboratory mainly measures reflectance and transmittance of vavious reflecting coatings in X-ray and vacuum ultraviolet wavelength region. To ensure the accuracy and reliability of the measurement, the error sources of the reflectometer and their influence on measurement were investigated. Based on experimental data and theoretic calculation, it has been found that the accuracy of the measurement is significantly dependent on the stability of the synchrotron radiation, the detector and the fixing of the sample. Several typical forms of the radiation fluctuating, detector damage and sample fixing are summarized, and their influences as well as influence of light spot size on measurement are analysed quantitatively and qualitatively. Some effective measures are taken to control the measurement error within 2%.
    Gan Shuyi, Liu Zhengkun, Xu Xiangdong, Hong Yilin, Liu Ying, Zhou Hongjun, Huo Tonglin, Fu Shaojun. Error Analysis for Reflectometer in National Synchrotron Radiation Laboratory[J]. Acta Optica Sinica, 2008, 28(11): 2136
    Download Citation