[1] D A Wojaczck, E F Plinski, J S Witkowski. Thermodynamic and optical parameters of the RF pluse excited slab-waveguide CO2 laser. Optica Applicata, 35, 215-224(2005).
[2] Kobayashi S, Terai K. 1 kW slab CO2 laser excited by a selfexcited RF generat [C]Proceedings of SPIE, 1997, 3092: 1530.
[3] Abram R, Hall D R. 2didmensional waveguide CO2 laser arrays beam refming [C]GCLHPL’96, 1996: 2530.
[4] Liu Juan. Excitation acteristics of high power RF carbon dioxide laser[D]. Wuhan: Huazhong University of Science Technology, 2009. (in Chinese)
[5] Ma Ke. Study on high frequency power supply control system of gas disge laser[D]. Wuhan: Huazhong University of Science Technology, 2017. (in Chinese)
[6] Joseph J C. Radio Frequency Circuit Design [M]. He Jin, translated. Beijing: Science Press, 2007: 311. (in Chinese)
[7] Fengguang Cao, Deling Zhang, Xinbing Wang, et al. Impedance matching study in RF power supply. Applied Laser, 25, 102-136(2005).
[8] H Q Wang, F J Meng, L H Guo, et al. High power TEA CO2 laser control system based on DSP. Chinese Optics, 4, 411-417(2020).
[9] Dong Weihao, Design of automatic impedance matching system based on BP neural wk[D]. Tianjin: Tianjin University of Technology, 2019. (in Chinese)
[10] G J Lin, T Zhan, J W Li, et al. Research and development of digital RF power supply network automatic matcher. Technological Innovation and Application, 1, 116-117(2016).
[11] K F Zhang, T Jiang, L Shao, et al. Research on LD precision temperature control based on a new fuzzy PID control unit. Optical Precision Engineering, 25, 648-655(2017).
[12] Long Zhang, Jiansheng Chen, Jing Gao, et al. Design of power supply and temperature control system for high-power semiconductor laser. Infrared and Laser Engineering, 47, 1005003(2018).
[13] Yue Han, M F Cong, Ke Li, et al. Stability analysis and design of radio frequency power amplifiers. Microelectronics & Computers, 35, 72-74(2018).
[14] B B Pan, Xu Liang, N Pan, et al. An excimer laser control system based on LabVIEW. Chinese Optics, 44, 343-348(2020).