Rotation Method for System Error Calibration of Interferometer

ZHANG Jian-feng; CAO Xue-dong; JING Hong-wei; WU Shi-bin; YIN Xu

doi:10.3969/j.issn.1003-501x.2011.12.013

Journals >Opto-Electronic Engineering >Volume 38 >Issue 12 >Page 69 > Article

Opto-Electronic Engineering
Vol. 38, Issue 12, 69 (2011)

Rotation Method for System Error Calibration of Interferometer

ZHANG Jian-feng^1、2、*, CAO Xue-dong¹, JING Hong-wei¹, WU Shi-bin¹, and YIN Xu¹

Author Affiliations

¹[in Chinese]

²[in Chinese]

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DOI: 10.3969/j.issn.1003-501x.2011.12.013 Cite this Article

ZHANG Jian-feng, CAO Xue-dong, JING Hong-wei, WU Shi-bin, YIN Xu. Rotation Method for System Error Calibration of Interferometer[J]. Opto-Electronic Engineering, 2011, 38(12): 69 Copy Citation Text

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References

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[7] XU Chen, CHEN Lei, YI Jia-yi. Method for absolute flatness measurement of optical surfaces [J]. Applied Optics(S1539-4522), 2009, 48(13): 2536-2541.

[8] CHRIS J Evans, ROBERT N Kestner. Test optics error removal [J]. Applied Optics(S1539-4522), 1996, 35(7): 1015-1021.

[10] Otaki K, Yamamoto T, Fukuda Y, et al. Accuracy evaluation of the point diffraction interferometer for extreme ultraviolet lithography aspheric mirror [J]. J.Vav.Sci.Technol(S1520-8567), 2002, 20(1): 295-300.

[13] VINCENZO Greco, RICCARDO Tronconi, CIRO Del Veuhio, et al. Absolute Calibration of an Optical Flat [J]. Applied Optics(S1539-4522), 1999, 38(10): 2018-2027.

CLP Journals

[1] Lin Weihao, Luo Hongxin, Song Li, Zhang Yifei, Wang Jie. Absolute Flatness Measurement of Optical Elements in Synchrotron Radiation[J]. Acta Optica Sinica, 2012, 32(9): 912005

[2] [in Chinese], [in Chinese], [in Chinese]. Study on the Absolute Testing of Rotationally Asymmetric Surface Deviation with the Method of Single Rotation[J]. Acta Optica Sinica, 2012, 32(8): 812006

[3] Qi Lili, Wan Qiuhua. Angle-Measurement Technology of an Optical Pattern Rotary Encoder and Its Hardware Implementation[J]. Acta Optica Sinica, 2013, 33(4): 412001

ZHANG Jian-feng, CAO Xue-dong, JING Hong-wei, WU Shi-bin, YIN Xu. Rotation Method for System Error Calibration of Interferometer[J]. Opto-Electronic Engineering, 2011, 38(12): 69

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