Junwu Wang, Hongwen Xuan, Xinbing Wang, Vassily S. Zakharov. Laser‑Induced Discharge Plasma Extreme Ultraviolet Source[J]. Chinese Journal of Lasers, 2024, 51(7): 0701012
- Chinese Journal of Lasers
- Vol. 51, Issue 7, 0701012 (2024)
Fig. 1. Experimental setup for laser-induced discharge produced plasma
Fig. 2. Laser intensity and waveforms of voltage and current in LDP when voltage is 15 kV
Fig. 3. EUV spectra of LPP and LDP at different voltages
Fig. 4. Total radiation power and EUV radiation power of laser produced plasma when laser energy is 145 mJ
Fig. 5. Simulation results of radiation distribution of laser plasma. (a) Average ionization degree distribution of tin ions;(b) EUV radiation power density distribution
Fig. 6. Total radiation powers and EUV radiation powers of LDP when voltages are 7 kV and 15 kV
Fig. 7. Simulation results of radiation distribution of LDP (voltage is 7 kV). (a) Average ionization degree distribution of tin ions; (b) EUV radiation power density distribution
Fig. 8. Simulation results of radiation distribution of LDP (voltage is 15 kV).(a) Average ionization degree distribution of tin ions; (b) EUV radiation power density distribution
Fig. 9. UTA between different Sn12+ excited states. (a) 4p64d2→4p64d4f; (b) 4p64d4f →4p64f2; (c) 4p64d2→4p54d3; (d) 4p54d3→4p44d4
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