Effect of Pulse Power on the Phase Structure and Spectral Properties of SiCx Thin Films Containing Si Quantum Dots

ZHANG Zhi-heng; ZHAO Fei; YANG Wen; MO Jing-hui; GE Wen; LI Xue-ming; YANG Pei-zhi

doi:10.3964/j.issn.1000-0593(2019)02-0529-06

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