• Acta Optica Sinica
  • Vol. 33, Issue 4, 431001 (2013)
Zhou Ming*, Chen Gang, and Liu Dingquan
Author Affiliations
  • [in Chinese]
  • show less
    DOI: 10.3788/aos201333.0431001 Cite this Article Set citation alerts
    Zhou Ming, Chen Gang, Liu Dingquan. Backside Reflection Error for Ellipsometric Measurement Eliminated by Spatial Splitting Beam Method[J]. Acta Optica Sinica, 2013, 33(4): 431001 Copy Citation Text show less
    References

    [1] D. Amans, S. Callard, A. Gagnaire et al.. Ellipsometric study of silicon nanocrystal optical constants [J]. J. Appl. Phys., 2003, 93(7): 4173~4179

    [2] P. L. Washington, H. C. Ong, J. Y. Dai et al.. Determination of the optical constants of zinc by spectroscopic ellipsometry [J]. Appl. Phys. Lett., 1998, 72(25): 3261~3263

    [3] Zhou Yi, Wang Aiying. Determination of optical constants and thickness of diamond-like carbon films by a multiple sample method[J]. Acta Optica Sinica, 2010, 30(8): 2468~2472

    [4] Zhang Deheng, Xu Zhaofang, Li Boxun. Study on optical property of DLC/Ag/DL C multilayer films [J]. Acta Optica Sinica, 2008, 28(10): 2031~2035

    [5] D. P. Arndt, R. M. A. Azzam, J. M. Bennett et al.. Multiple determine of the optical constants of thin-film coating materials [J]. Appl. Opt., 1984, 23(20): 3571~3593

    [6] C. M. Herzinger, B. Johs, W. A. McGahan et al.. Ellipsometric determination of optical constants for silicon and thermally grown silicon dioxide via a multi-sample, multi-wavelength, multi-angle investigation [J]. J. Appl. Phys., 1998, 83(6): 3323~3336

    [7] Wu Suyong, Long Xingwu, Yang Kaiyong. Technique to minimize the characterization eviations of optical parameters of thin films caused by ellipsometric measurement systematic errors[J]. Acta Optica Sinica, 2012, 32(6): 0631001

    Zhou Ming, Chen Gang, Liu Dingquan. Backside Reflection Error for Ellipsometric Measurement Eliminated by Spatial Splitting Beam Method[J]. Acta Optica Sinica, 2013, 33(4): 431001
    Download Citation