Resonant IR detectors based on microbridge resonators electrothermally excited and piezoresistively detected using polysilicon resistors of negative TCR

HAN Jian-Qiang; LI Sen-Lin; LI Yan; WANG Xiao-Fei; FENG Ri-Sheng

doi:10.11972/j.issn.1001-9014.2015.02.002

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