Yicun LI, Xiaobin HAO, Bing DAI, Dongyue WEN, Jiaqi ZHU, Fangjuan GENG, Weiping YUE, Weiqun LIN. Optimization Design of MPCVD Single Crystal Diamond Growth Based on Plasma Diagnostics [J]. Journal of Inorganic Materials, 2023, 38(12): 1405
- Journal of Inorganic Materials
- Vol. 38, Issue 12, 1405 (2023)
1. HITLH-2450M diamond growth system and plasma diagnostic system
2. Pressure-microwave power parameter curves (a) and Hα intensity of plasma central region (b) under three matching modes
3. At a certain pressure, change of reflected power (a) and change of Hα intensity (b) with input power
4. Atomic hydrogen concentration distributions in plasma at various observation parameter points under optimal absorption matching mode with similar distribution pattern changes in other modes
5. Quantitative analysis of plasma in uniform increase and optimal absorption matching mode
6. Changes in plasma major axis and minor axis (a), eccentricity (b), volume (c), and energy density (d) with input power under constant pressure with data at 16 kPa showing the selected display, and variation trends being similar under different pressures
7. Prediction map of MPCVD single crystal diamond growth process
8. Photos of plasma growth environment of three samples (with Hα filter) and the surface optical micrographs after 10 h of growth
9. Plasma emission spectra in the growth of single crystal diamond
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Table 1. Parameter points selection based on the predicted map and growth parameters of actual single crystal diamond
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