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Journals >Chinese Optics Letters >Volume 14 >Issue 8 >Page 081203 > Article

Chinese Optics Letters
Vol. 14, Issue 8, 081203 (2016)

Interference-aided spectrum-fitting method for accurate film thickness determination

Xingxing Liu^1、2、3, Shaowei Wang^1、2、*, Hui Xia¹, Xutao Zhang^1、3, Ruonan Ji^1、2、3, Tianxin Li^1、2, and Wei Lu^1、2

Author Affiliations

¹National Laboratory for Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, China

²Shanghai Engineering Research Center of Energy-Saving Coatings, Shanghai 200083, China

³University of Chinese Academy of Sciences, Beijing 100049, China

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DOI: 10.3788/COL201614.081203 Cite this Article Set citation alerts

Xingxing Liu, Shaowei Wang, Hui Xia, Xutao Zhang, Ruonan Ji, Tianxin Li, Wei Lu. Interference-aided spectrum-fitting method for accurate film thickness determination[J]. Chinese Optics Letters, 2016, 14(8): 081203 Copy Citation Text

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References

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[11] Z. Y. Li, L. L. Lin. Phys. Rev. E, 67, 046607(2003).

[12] T. Gungor, B. SaKa. Thin Solid Films, 467, 319(2004).

[13] Z. X. Yu, D. Mo. Thin Solid Films, 425, 108(2003).

[14] S. Bosch, J. F. Borrull, J. S. Parramon. Solid-State Electron., 45, 703(2001).

[15] S. W. Wang, F. L. Chen, L. Y. Liang, S. L. He, Y. G. Wang, X. S. Chen, W. Lu. IEEE Wireless Commun., 22, 61(2015).

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CLP Journals

[1] Xiangjun Dai, Tianyu Yuan, Hanyang Jiang, Xinxing Shao, Meiling Dai, Hai Yun, Fujun Yang, Xiaoyuan He. Multi-frequency lateral shear interferometer system for simultaneous measurement of thickness and three-dimensional shape[J]. Chinese Optics Letters, 2018, 16(3): 031201

Data from CrossRef

[1] Xu Chen, Mingfei Wu, Xingxing Liu, Ding Wang, Feng Liu, Yuwei Chen, Fei Yi, Wanxia Huang, Shaowei Wang. Tuning the Doping Ratio and Phase Transition Temperature of VO2 Thin Film by Dual-Target Co-Sputtering. Nanomaterials, 9, 834(2019).

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Xingxing Liu, Shaowei Wang, Hui Xia, Xutao Zhang, Ruonan Ji, Tianxin Li, Wei Lu. Interference-aided spectrum-fitting method for accurate film thickness determination[J]. Chinese Optics Letters, 2016, 14(8): 081203

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