Interference-aided spectrum-fitting method for accurate film thickness determination

Xingxing Liu; Shaowei Wang; Hui Xia; Xutao Zhang; Ruonan Ji; Tianxin Li; Wei Lu

doi:10.3788/COL201614.081203

Journals >Chinese Optics Letters >Volume 14 >Issue 8 >Page 081203 > Article

Chinese Optics Letters
Vol. 14, Issue 8, 081203 (2016)

Interference-aided spectrum-fitting method for accurate film thickness determination

Xingxing Liu^1、2、3, Shaowei Wang^1、2、*, Hui Xia¹, Xutao Zhang^1、3, Ruonan Ji^1、2、3, Tianxin Li^1、2, and Wei Lu^1、2

Author Affiliations

¹National Laboratory for Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, China

²Shanghai Engineering Research Center of Energy-Saving Coatings, Shanghai 200083, China

³University of Chinese Academy of Sciences, Beijing 100049, China

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DOI: 10.3788/COL201614.081203 Cite this Article Set citation alerts

Xingxing Liu, Shaowei Wang, Hui Xia, Xutao Zhang, Ruonan Ji, Tianxin Li, Wei Lu. Interference-aided spectrum-fitting method for accurate film thickness determination[J]. Chinese Optics Letters, 2016, 14(8): 081203 Copy Citation Text

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