• Infrared and Laser Engineering
  • Vol. 53, Issue 1, 20230309 (2024)
Molin Liu1, Jiayi Liu1, Yizhe Wang1, Xuehao Yu1..., Xiaodong Fang1,2 and Libing You1,2|Show fewer author(s)
Author Affiliations
  • 1College of New Materials and New Energies, Shenzhen Technology University, Shenzhen 518118, China
  • 2Shenzhen Shengfang Technology Co., Ltd., Shenzhen 518173, China
  • show less
    DOI: 10.3788/IRLA20230309 Cite this Article
    Molin Liu, Jiayi Liu, Yizhe Wang, Xuehao Yu, Xiaodong Fang, Libing You. Improvement of the stability of excimer laser output pulse energy by beam combination[J]. Infrared and Laser Engineering, 2024, 53(1): 20230309 Copy Citation Text show less
    (a) Fitting diagram of normal distribution curve of No.1 data; (b) Fitting diagram of normal distribution curve of No.2 data; (c) Fitting diagram of normal distribution curve of No.3 data
    Fig. 1. (a) Fitting diagram of normal distribution curve of No.1 data; (b) Fitting diagram of normal distribution curve of No.2 data; (c) Fitting diagram of normal distribution curve of No.3 data
    Fitting diagram of normal distribution curve of No.4 data
    Fig. 2. Fitting diagram of normal distribution curve of No.4 data
    Fitting diagram of normal distribution curve of No.1, No.2 and No.3 data simulation
    Fig. 3. Fitting diagram of normal distribution curve of No.1, No.2 and No.3 data simulation
    Schematic diagram of excimer beam combining optical path
    Fig. 4. Schematic diagram of excimer beam combining optical path
    (a) Fitting curves of the normal distribution curves of PLD20, PLD30, and after the first laser beam combination; (b) Fitting curves of the normal distribution curves of PLD20, PLD30, and after the second laser beam combination; (c) Fitting curves of the normal distribution curves of PLD20, PLD30, and after the third laser beam combination
    Fig. 5. (a) Fitting curves of the normal distribution curves of PLD20, PLD30, and after the first laser beam combination; (b) Fitting curves of the normal distribution curves of PLD20, PLD30, and after the second laser beam combination; (c) Fitting curves of the normal distribution curves of PLD20, PLD30, and after the third laser beam combination
    Data numberEnergy average/mJStandard deviationRelative standard deviation
    1152.21.621.06%
    2152.91.340.88%
    3153.31.460.95%
    Table 1. Statistics of laser output pulse parameters
    ParameterValue
    Data number4
    Energy average/mJ305.1
    Standard deviation2.14
    Relative standard deviation0.70%
    Theoretical standard deviation0.69%
    Actual theoretical error1.4%
    Table 2. Statistics of output pulse parameters of any two laser beams
    ParameterValue
    Data number1+2+3
    Energy average/mJ458.5
    Standard deviation2.77
    Relative standard deviation0.60%
    Theoretical standard deviation0.56%
    Actual theoretical error7.1%
    Table 3. Statistics of combined output pulse parameters of three lasers
    Data numberEquipment numberEnergy average/mJStandard deviationRelative standard deviationTheoretical standard deviationActual theoretical error
    1PLD20356.64.951.39%--
    PLD30354.54.411.24%--
    Laser beam combination687.25.950.86%0.93%7.52%
    2PLD20368.44.191.14%--
    PLD30354.54.411.24%--
    Laser beam combination694.55.540.79%0.84%5.95%
    3PLD20328.44.891.49%--
    PLD30331.44.501.35%--
    Laser beam combination646.85.400.83%1.00%17.00%
    Table 4. Statistics of output pulse parameters of actual combined beam laser
    Molin Liu, Jiayi Liu, Yizhe Wang, Xuehao Yu, Xiaodong Fang, Libing You. Improvement of the stability of excimer laser output pulse energy by beam combination[J]. Infrared and Laser Engineering, 2024, 53(1): 20230309
    Download Citation