Molin Liu, Jiayi Liu, Yizhe Wang, Xuehao Yu, Xiaodong Fang, Libing You. Improvement of the stability of excimer laser output pulse energy by beam combination[J]. Infrared and Laser Engineering, 2024, 53(1): 20230309

Search by keywords or author
- Infrared and Laser Engineering
- Vol. 53, Issue 1, 20230309 (2024)

Fig. 1. (a) Fitting diagram of normal distribution curve of No.1 data; (b) Fitting diagram of normal distribution curve of No.2 data; (c) Fitting diagram of normal distribution curve of No.3 data

Fig. 2. Fitting diagram of normal distribution curve of No.4 data

Fig. 3. Fitting diagram of normal distribution curve of No.1, No.2 and No.3 data simulation

Fig. 4. Schematic diagram of excimer beam combining optical path

Fig. 5. (a) Fitting curves of the normal distribution curves of PLD20, PLD30, and after the first laser beam combination; (b) Fitting curves of the normal distribution curves of PLD20, PLD30, and after the second laser beam combination; (c) Fitting curves of the normal distribution curves of PLD20, PLD30, and after the third laser beam combination
|
Table 1. Statistics of laser output pulse parameters
|
Table 2. Statistics of output pulse parameters of any two laser beams
|
Table 3. Statistics of combined output pulse parameters of three lasers
|
Table 4. Statistics of output pulse parameters of actual combined beam laser

Set citation alerts for the article
Please enter your email address