Three-Dimensional Microfabrication by Shaped Femtosecond Laser Pulses

Lingling Qiao; Wei Chu; Zhe Wang; Ya Cheng

doi:10.3788/AOS201939.0126012

Journals >Acta Optica Sinica >Volume 39 >Issue 1 >Page 0126012 > Article

Acta Optica Sinica
Vol. 39, Issue 1, 0126012 (2019)

Three-Dimensional Microfabrication by Shaped Femtosecond Laser Pulses

Lingling Qiao^1、*, Wei Chu^1、2、*, Zhe Wang^1、3, and Ya Cheng^1、2、*

Author Affiliations

¹ State Key Laboratory of High Field Laser Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China

² The Extreme Optoelectromechanics Laboratory, School of Physics and Materials Science, East China Normal University, Shanghai 200241, China

³ School of Physical Science and Technology, ShanghaiTech University, Shanghai 200031, China

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DOI: 10.3788/AOS201939.0126012 Cite this Article Set citation alerts

Lingling Qiao, Wei Chu, Zhe Wang, Ya Cheng. Three-Dimensional Microfabrication by Shaped Femtosecond Laser Pulses[J]. Acta Optica Sinica, 2019, 39(1): 0126012 Copy Citation Text

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References

Lingling Qiao, Wei Chu, Zhe Wang, Ya Cheng. Three-Dimensional Microfabrication by Shaped Femtosecond Laser Pulses[J]. Acta Optica Sinica, 2019, 39(1): 0126012

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