[1] Zhang Zhihai. Study on Some Key Technologies of MOEMS-based Grating Moving Light Modulator Array [D]. Chongqing: Chongqing University,2007. 1-2
[2] D. M. Bloom. The grating light valve: revolutionizing display technology[C]. SPIE,1997,3013: 165-171
[3] Chen Feifan,Yin Ling,Li Yunlong et al.. Review and prospects of research on micro-opto-electro-mechanical system[J]. Microfabrication Technol.,2002,20(3): 1-7
[5] Yan Xu,Huang Shanglian,Zhang Jie et al.. Grating light modulator based on MOEMS[C]. 11th Commission for Optoelectronics Technology & Systems. 2005. 795-799
[6] Joseph I. Seeger,Selden B. Craary. Stabilization of electrostatically actuated mechanical devices[C]. International Conference on Solid-state Sensors and Actuators,Chicago,America.1997. 16-19
[7] M. A. Michalicek,D. E. Sene,V. M. Bright. Advanced modeling of micromirror devices[C]. Proceedings of the International Conference on Integrated Micro/Nanotechnology for Space Applications,NASA & Aerospace Corp,1995. 214-229
[8] Gary Keith Fedder. Simulation of Microelectromechanical Systems[D]. Berkeley: California University,1994. 67-156
[9] Yan Xu. Structural Parameter Analysis and Experiment of MEMS-based Grating Moving Light Modulator[D]. Chongqing: University of Chongqing,2006. 18-19
[10] Adirak Kanchanaharuthai,Adisorn Tuantranont. Feedback controller design with D stability in silicon-micromachined piston micromirrors[C]. IEEE,2002,2: 936-940