• Laser & Optoelectronics Progress
  • Vol. 47, Issue 3, 32301 (2010)
Wang Wei1、2、*, Wen Zhiyu1、2, Zhang Zhihai1、2, Jin Zhu1、2, Guo Yuanjun1、2, and Mo Xiangxia1、2
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • show less
    DOI: 10.3788/lop47.032301 Cite this Article Set citation alerts
    Wang Wei, Wen Zhiyu, Zhang Zhihai, Jin Zhu, Guo Yuanjun, Mo Xiangxia. Grating Light Modulator Applied to Novel Micro-Spectrometer[J]. Laser & Optoelectronics Progress, 2010, 47(3): 32301 Copy Citation Text show less
    References

    [1] Zhang Zhihai. Study on Some Key Technologies of MOEMS-based Grating Moving Light Modulator Array [D]. Chongqing: Chongqing University,2007. 1-2

    [2] D. M. Bloom. The grating light valve: revolutionizing display technology[C]. SPIE,1997,3013: 165-171

    [3] Chen Feifan,Yin Ling,Li Yunlong et al.. Review and prospects of research on micro-opto-electro-mechanical system[J]. Microfabrication Technol.,2002,20(3): 1-7

    [4] Zhang Jie,Huang Shanglian,Yan Xu et al.. Optimization and analysis for structural parameters of grating moving light modulator[J]. Acta Optica Sinica,2006,26(8): 1121-1126

    [5] Yan Xu,Huang Shanglian,Zhang Jie et al.. Grating light modulator based on MOEMS[C]. 11th Commission for Optoelectronics Technology & Systems. 2005. 795-799

    [6] Joseph I. Seeger,Selden B. Craary. Stabilization of electrostatically actuated mechanical devices[C]. International Conference on Solid-state Sensors and Actuators,Chicago,America.1997. 16-19

    [7] M. A. Michalicek,D. E. Sene,V. M. Bright. Advanced modeling of micromirror devices[C]. Proceedings of the International Conference on Integrated Micro/Nanotechnology for Space Applications,NASA & Aerospace Corp,1995. 214-229

    [8] Gary Keith Fedder. Simulation of Microelectromechanical Systems[D]. Berkeley: California University,1994. 67-156

    [9] Yan Xu. Structural Parameter Analysis and Experiment of MEMS-based Grating Moving Light Modulator[D]. Chongqing: University of Chongqing,2006. 18-19

    [10] Adirak Kanchanaharuthai,Adisorn Tuantranont. Feedback controller design with D stability in silicon-micromachined piston micromirrors[C]. IEEE,2002,2: 936-940

    Wang Wei, Wen Zhiyu, Zhang Zhihai, Jin Zhu, Guo Yuanjun, Mo Xiangxia. Grating Light Modulator Applied to Novel Micro-Spectrometer[J]. Laser & Optoelectronics Progress, 2010, 47(3): 32301
    Download Citation