Liwei Zhang, Haobo Chen, Wenqing Sun, Jun Wang, Quanying Wu. Review of Anti-Vibration Technology in Phase-Shifting Interferometry[J]. Laser & Optoelectronics Progress, 2023, 60(19): 1900005
- Laser & Optoelectronics Progress
- Vol. 60, Issue 19, 1900005 (2023)
Fig. 1. Classification of anti-vibration technology in phase-shifting interferometry
![Interference system with tunable semiconductor laser as light source[14]](/richHtml/lop/2023/60/19/1900005/img_02.jpg)
Fig. 2. Interference system with tunable semiconductor laser as light source[14]
Fig. 3. Flow chart of AIA algorithm
Fig. 4. Recovery phase error before and after vibration introduction[36]
Fig. 5. Phase-error pattern[40]
Fig. 6. Linear carrier frequency interferogram
Fig. 7. Parallel phase shifting based on beam spliter (BS)[73]
Fig. 8. Receiving four parallel phase-shifting interferograms with single CCD[75]
Fig. 9. Pixelated polarization mask[84]
Fig. 10. Air floating vibration isolation optical platform
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