Improvement of thickness uniformity and elements distribution homogeneity for multicomponent films prepared by coaxial scanning pulsed laser deposition technique

Juguang Hu; Qiwen Li; Xiaodong Lin; Yi Liu; Jinghua Long; Liuyang Wang; Huabin Tang

doi:10.3788/col201412.072201

[1] H. Palonen, H. Huhtinen, and P. Paturi, Thin Solid Films 519, 8058 (2011).

[2] K. Develos-Bagarinao, H. Yamasaki, J. C. Nie, and Y. Nakagawa, Supercond. Sci. Tech. 18, 667 (2005).

[3] P. Jackson, D. Hariskos, E. Lotter, S. Paetel, R. Wuerz, R. Menner, W. Wischmann, and M. Powalla, Prog. Photovolt Res. Appl. 19, 894 (2011).

[4] Y. H. Jo, B. C. Mohanty, and Y. S. Cho, Appl. Sur. Sci. 256, 6819 (2010).

[5] J. J. Yang, R. Wang, W. Liu, Y. Sun, and X. N. Xiao, J. Phys. D Appl. Phys. 42, 215305 (2009).

[6] A. S. Kindyak, V. V. Kindyak, and V. F. Gremenok, Mat. Lett. 28, 273 (1996).

[7] T. Nakada and S. Shirakata, Sol. Energ. Mat. Sol. C 95, 1463 (2011).

[8] C. D. R. Ludwig, T. Gruhn, C. Felser, T. Schilling, J. Windeln, and P. Kratzer, Phys. Rev. Lett. 105, 025702 (2009).

[9] H. Qi, M. Zhu, W. Zhang, K. Yi, H. He, and J. Shao, Chin. Opt. Lett. 10, 013104 (2012).

[10] S. Venkatachalam and Y. Kanno, Curr. Appl. Phys. 9, 1232 (2009).

[11] J. M. Lackner, Sur. Coat. Technol. 200, 1439 (2005).

[12] N. Pryds, J. Schou, and S. Linderoth, Appl. Surf. Sci. 253, 8231 (2007).

[13] M. Fukutomi, K. Komori, K. Kawagishi, and K. Togano, Phys. C 357-360, 1342 (2001).

[14] J. A. Greer and M. D. Tabat, J. Vac. Sci. Technol. A 13, 1175 (1995).

[15] A. Pique, R. A. McGill, D. B. Chrisey, D. Leonhardt, T. E. Mslna, B. J. Spargo, J. H. Callahan, R. W. Vachet, R. Chung, and M. A. Bucaro, Thin Solid Films 355-356, 536 (1999).

[16] D. B. Chrisey, A. Pique, R. A. McGill, J. S. Horwitz, and B. R. Ringeisen, Chem. Rev. 103, 553 (2003).

[17] L. Egerhazi, Zs. Geretovszky, T. Szorenyi, and F. Bari, Appl. Sur. Sci. 257, 5324 (2011).

[18] C. Chen, P. P. Ong, and H. Wang, Thin Solid Films 382, 275 (2001).

[19] D. Guido, L. Cultrera, and A. Perrone, Surf. Coat. Tech. 180-181, 603 (2004).

[20] W. Biegel, R. Klarmann, B. Stritzker, B. Schey, and M. Kuhn, Appl. Surf. Sci. 168, 227 (2000).

[21] N. Pryds, B Toftmann, J. B. Bilde-Sorensen, and S. Linderoth, Appl. Surf. Sci. 252, 4882 (2006).

[22] L. Cultrera, M. I. Zeifman, and A. Perrone, Phys. Rev. B 73, 075304 (2006).

[23] J. Schou, Appl. Surf. Sci. 255, 5191 (2009).

[24] C. V. Varanasi, K. D. Leedy, D. H. Tomich, and G. Subramanyam, Thin Solid Films 517, 2878 (2009).

[25] X. Ni, K. K. Anoop, M. Bianco, S. Amoruso, X. Wang, T. Li, M. Hu, and Z. Song, Chin. Opt. Lett. 11, 093201 (2013).

[26] T. C. Droubay, L. Qiao, T. C. Kaspar, M. H. Engelhard, V. Shutthanandan, and S. A. Chambers, Appl. Phys. Lett. 97, 124105 (2010).

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