Improvement of thickness uniformity and elements distribution homogeneity for multicomponent films prepared by coaxial scanning pulsed laser deposition technique

Juguang Hu; Qiwen Li; Xiaodong Lin; Yi Liu; Jinghua Long; Liuyang Wang; Huabin Tang

doi:10.3788/col201412.072201

Journals >Chinese Optics Letters >Volume 12 >Issue 7 >Page 072201 > Article

Chinese Optics Letters
Vol. 12, Issue 7, 072201 (2014)

Improvement of thickness uniformity and elements distribution homogeneity for multicomponent films prepared by coaxial scanning pulsed laser deposition technique

Juguang Hu, Qiwen Li, Xiaodong Lin, Yi Liu, Jinghua Long, Liuyang Wang, and Huabin Tang

DOI: 10.3788/col201412.072201 Cite this Article Set citation alerts

Juguang Hu, Qiwen Li, Xiaodong Lin, Yi Liu, Jinghua Long, Liuyang Wang, Huabin Tang. Improvement of thickness uniformity and elements distribution homogeneity for multicomponent films prepared by coaxial scanning pulsed laser deposition technique[J]. Chinese Optics Letters, 2014, 12(7): 072201 Copy Citation Text

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