GONG Xue-peng, LU Qi-peng, PENG Zhong-qi. Design and testing of deflecting mirror system of X-ray interference lithography beamline[J]. Optics and Precision Engineering, 2014, 22(8): 2142

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- Optics and Precision Engineering
- Vol. 22, Issue 8, 2142 (2014)
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