Thickness Optimization and Photoelectric Performance Test of UV Sensitized Film of CMOS Sensor

LIU Qiong; MA Shou-bao; QIAN Xiao-chen; RUAN Jun; LU Zhong-rong; TAO Chun-xian

doi:10.3788/gzxb20174606.0604002

[1] JOOST S. Development and application of image sensor［M］. China Public Security, 2015: 86-87.

[2] MICHAL A D, ANDREW A B. Stability of lumogen film on CCDs［J］. The International Society for Optical Engineering, 2013, 2415: 205-210.

[3] WANG Li-hui, WANG Xiao-kun, CHEN Bo, et al. Study of ultraviolet and extreme ultraviolet phosphors for imaging detector［J］. Optical Technique, 2006, 32: 479-481.

[4] TIAN Xin, ZHANG Da-wei, HUANG Yuan-shen, et al. Research progress in thin film technology applied in UV enhanced image sensors［J］. Laser Journal, 2008, 29(5): 9-10.

[5] LIU Meng, ZHANG Da-wei, XIE Pin, et al. Investigation in UV-enhanced coatings based on Zn2SiO4:Mn for image sensors［J］. Instrument Technique and Sensor, 2009, 9(9): 12-14.

[6] DU Chen-guang, SUN Li-qun, DING Zhi-tian, et al. Experiment study of enhancing CCD ultraviolet response using coronene［J］. Optical Technique, 2010, 36(5): 735-757.

[7] BASF A G. Technical Information: Lumogen J Yellow S 0790. Germany: BASE SE, 2005, 1.

[8] WENDY A R, FRANKS, MARTIN J K, et al. Inorganic phosphor coatings for UV responsive CCD image sensors［J］. The International Society for Optical Engineering, 2000, 33: 33-41.

[9] BEBEK C J, EMES J H, GROOM D E, et al. CCD development for the dark energy spectroscopic instrument［J］. IOP Sciense, 2015: 1-10.

[10] ZHANG Da-wei, TIAN Xin, HUANG Yuan-shen, et al. Preparation and spectral characterization of lumogen coatings for UV responsive CCD image sensors［J］. Spectroscopy and Spectral Analysis, 2010, 30(5): 1171-1174.

[11] JIANG Lin, ZHANG Da-wei, TAO Chun-xian, et al. Preparation by spin coating technology and characterization of UV~enhanced lumogen film［J］. Spectroscopy and Spectral Analysis, 2013, 33(2): 468-470.

[12] LU Zhong-rong, NI Zheng-ji, TAO Chun-xian, et al. The research of UV-responsive sensitivity enhancement of fluorescent coating films by MgF2 layer［J］. Spectroscopy and Spectral Analysis, 2014, 34(3): 709-712.

[13] REN Hang, ZHANG Tao. Study on grade CCD camera reduction noise［J］. Microcomputer Information, 2009, 25(2): 129-131.

[14] HAN Cai-qin, TAO Yue-zhen, LI Hua, et al. Research for response nonuniformity of digital CCD camera in different intensity of illumination［J］. Journal of Jiangxi Normal University, 2009, 33(4): 398-400.

[15] EMVA Standard 1288: Standard of characterization of image sensors and cameras. Release 3, 0, 2010, 11: 5-9.

CLP Journals