Ziye Zhou, Zhongyi Feng, Linhai Huang, Hao Xian. Structure Design of Compact Piezoelectric Fast Steering Mirror with High Performance[J]. Chinese Journal of Lasers, 2021, 48(13): 1305002
- Chinese Journal of Lasers
- Vol. 48, Issue 13, 1305002 (2021)
Fig. 1. PCSA for the compact fast steering mirror. (a)Photograph of the PCSA;(b)stroke response of PCSA
Fig. 2. Structure diagram of compacted FSM. (a) Distribution of PCSA; (b) working principle of compacted FSM deflecting around Y axis; (c) photograph of the compacted FSM
Fig. 3. Static lumped stiffness model of the compacted FSM
Fig. 4. Dynamic analysis model of the compact FSM
Fig. 5. Photograph of compacted FSM experimental measurement system
Fig. 6. Relationship between the tilt angle and the time of the FSM
Fig. 7. Resonance frequency test results of the compact FSM. (a) Result along X direction without mirror; (b) result along Y direction without mirror; (c) result along X direction with mirror; (d) result along Y direction with mirror
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Table 1. Geometrical parameters of the FSM
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Table 2. Parameters of components of the FSM
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