In order to reduce the recast layer of the laser etching crater and to increase the etching depth the effect of laser pulse width and waveform on laser etching crater morphology is studied by using double acousto-optic modulation technique, comparing the pulse widths with 0.25, 7.5 and 200 μs, and comparing different waveforms with single peak, two peaks and three peaks. The results show that when the pulse width is 0.25 μs, the burr is more; when it is 200 μs, significant surface melting phenomenon appears; and when it is 7.5 μs the phenomenon of surface melting and the burr are significantly reduced. The surface of laser wave etching with a single peak has more burr with the depth of 7.5 μm, the one with three peaks appears the surface melting phenomenon with the depth of 10 μm, and when using two peaks waveform etching, the surface of burr and melting are the least, and the depth is 15 μm.